Takeo WAKUTSU

Follow

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and gas introduction mechanism
- Patent number 10,804,078
- Issue date Oct 13, 2020
- Tokyo Electron Limited
- Yutaka Fujino
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND GAS INTRODUCTION MECHANISM
- Publication number 20170309452
- Publication date Oct 26, 2017
- Yutaka FUJINO
- H01 - BASIC ELECTRIC ELEMENTS