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Takeru Takushima
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of polishing a silicon wafer
Patent number
8,877,643
Issue date
Nov 4, 2014
Sumco Corporation
Shuhei Matsuda
B24 - GRINDING POLISHING
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Patent Grant
Method of polishing silicon wafer
Patent number
8,147,295
Issue date
Apr 3, 2012
Sumco Corporation
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR POLISHING SILICON WAFER
Publication number
20130095660
Publication date
Apr 18, 2013
SUMCO CORPORATION
Ryuichi Tanimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF POLISHING SILICON WAFER AS WELL AS SILICON WAFER
Publication number
20120080775
Publication date
Apr 5, 2012
Shuhei Matsuda
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF POLISHING SILICON WAFER
Publication number
20090298394
Publication date
Dec 3, 2009
SUMCO CORPORATION
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS