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Takeshi AKAO
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Miyagi, JP
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Patents Grants
last 30 patents
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Patent Grant
Gas cylinder
Patent number
10,968,925
Issue date
Apr 6, 2021
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING DEVICE
Publication number
20240162075
Publication date
May 16, 2024
TOKYO ELECTRON LIMITED
Akira NAGAYAMA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
GAS CYLINDER
Publication number
20190010967
Publication date
Jan 10, 2019
TOKYO ELECTRON LIMITED
Takehiro UEDA
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL