Takeshi Akasaka

Follow

Person

Amagasaki-shi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
Nozzle device and substrate treating apparatus having using the device
- Publication number 20040222323
- Publication date Nov 11, 2004
- Sumitomo Precision Products Co., Ltd.
- Takeshi Akasaka
- B08 - CLEANING