Takeshi Asayama

Person

Hiratsuka-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Laser gas regenerating apparatus and electronic device manufacturin...
- Patent number 11,451,003
- Issue date Sep 20, 2022
- Gigaphoton Inc.
- Hiroaki Tsushima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser apparatus including gas supply device and exhausting device
- Patent number 11,239,625
- Issue date Feb 1, 2022
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser apparatus and electronic-device manufacturing method
- Patent number 11,079,686
- Issue date Aug 3, 2021
- Gigaphoton Inc.
- Keisuke Ishida
- G01 - MEASURING TESTING
Information Patent Grant
Laser apparatus
- Patent number 10,971,886
- Issue date Apr 6, 2021
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus
- Patent number 10,965,090
- Issue date Mar 30, 2021
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser apparatus and excimer laser system
- Patent number 10,177,520
- Issue date Jan 8, 2019
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser chamber device
- Patent number 10,050,403
- Issue date Aug 14, 2018
- Gigaphoton Inc.
- Hisakazu Katsuumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 9,991,665
- Issue date Jun 5, 2018
- Gigaphoton Inc.
- Hiroshi Umeda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas laser device and control method therefor
- Patent number 9,853,410
- Issue date Dec 26, 2017
- Gigaphoton Inc.
- Takeshi Asayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Excimer laser apparatus and excimer laser system
- Patent number 9,837,780
- Issue date Dec 5, 2017
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 9,806,490
- Issue date Oct 31, 2017
- Gigaphoton Inc.
- Hiroshi Umeda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser chamber
- Patent number 9,742,141
- Issue date Aug 22, 2017
- Gigaphoton Inc.
- Hiroaki Tsushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus
- Patent number 9,601,893
- Issue date Mar 21, 2017
- Gigaphoton Inc.
- Kouji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus
- Patent number 9,331,450
- Issue date May 3, 2016
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,901,524
- Issue date Dec 2, 2014
- Gigaphoton Inc.
- Takeshi Asayama
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source device
- Patent number 8,610,095
- Issue date Dec 17, 2013
- Gigaphoton Inc.
- Takayuki Yabu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,586,954
- Issue date Nov 19, 2013
- Gigaphoton Inc.
- Takeshi Asayama
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for cleaning collector mirror in EUV light gen...
- Patent number 8,536,550
- Issue date Sep 17, 2013
- Gigaphoton Inc.
- Takeshi Asayama
- B08 - CLEANING
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,481,983
- Issue date Jul 9, 2013
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,212,228
- Issue date Jul 3, 2012
- Komatsu Ltd.
- Tamotsu Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,158,959
- Issue date Apr 17, 2012
- Gigaphoton Inc.
- Takeshi Asayama
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
CONTROL METHOD OF LASER SYSTEM, LASER SYSTEM, AND ELECTRONIC DEVICE...
- Publication number 20230318252
- Publication date Oct 5, 2023
- Gigaphoton Inc.
- Takeshi ASAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER GAS REGENERATING APPARATUS AND ELECTRONIC DEVICE MANUFACTURIN...
- Publication number 20200403371
- Publication date Dec 24, 2020
- Gigaphoton Inc.
- Hiroaki TSUSHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXCIMER LASER APPARATUS AND ELECTRONIC-DEVICE MANUFACTURING METHOD
- Publication number 20200274315
- Publication date Aug 27, 2020
- Gigaphoton Inc.
- Keisuke ISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS
- Publication number 20190280451
- Publication date Sep 12, 2019
- Gigaphoton Inc.
- Takeshi ASAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS
- Publication number 20190173259
- Publication date Jun 6, 2019
- Gigaphoton Inc.
- Takeshi ASAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS
- Publication number 20190036290
- Publication date Jan 31, 2019
- Gigaphoton Inc.
- Takeshi ASAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM
- Publication number 20180048109
- Publication date Feb 15, 2018
- Gigaphoton Inc.
- Takeshi ASAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SYSTEM
- Publication number 20180013258
- Publication date Jan 11, 2018
- Gigaphoton Inc.
- Hiroshi UMEDA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXCIMER LASER CHAMBER DEVICE
- Publication number 20170346252
- Publication date Nov 30, 2017
- Gigaphoton Inc.
- Hisakazu KATSUUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SYSTEM
- Publication number 20170070023
- Publication date Mar 9, 2017
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER CHAMBER
- Publication number 20160365696
- Publication date Dec 15, 2016
- Gigaphoton Inc.
- Hiroaki TSUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE AND CONTROL METHOD THEREFOR
- Publication number 20160359291
- Publication date Dec 8, 2016
- Gigaphoton Inc.
- Takeshi ASAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM
- Publication number 20160254634
- Publication date Sep 1, 2016
- Gigaphoton Inc.
- Takeshi ASAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS
- Publication number 20160190763
- Publication date Jun 30, 2016
- Gigaphoton Inc.
- Kouji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS
- Publication number 20150194781
- Publication date Jul 9, 2015
- GIGAPHOTON INC.
- Takeshi ASAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...
- Publication number 20140166046
- Publication date Jun 19, 2014
- GIGAPHOTON INC.
- Takeshi Asayama
- B08 - CLEANING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20140008554
- Publication date Jan 9, 2014
- GIGAPHOTON INC.
- Takeshi ASAYAMA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20130126762
- Publication date May 23, 2013
- GIGAPHOTON INC.
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20120228527
- Publication date Sep 13, 2012
- Komatsu Ltd./Gigaphoton, Inc.
- Tamotsu ABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20120176036
- Publication date Jul 12, 2012
- Gigaphoton Inc.
- Takeshi ASAYAMA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20100243922
- Publication date Sep 30, 2010
- Takeshi Asayama
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
- Publication number 20100200776
- Publication date Aug 12, 2010
- GIGAPHOTON INC.
- Takayuki Yabu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...
- Publication number 20090301517
- Publication date Dec 10, 2009
- Komatsu Ltd.
- Takeshi Asayama
- B08 - CLEANING
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20090250641
- Publication date Oct 8, 2009
- KOMATSU LTD.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20090224181
- Publication date Sep 10, 2009
- Tamotsu Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Takeshi Asayama

Person

Patents Grantslast 30 patents

Laser gas regenerating apparatus and electronic device manufacturin...

Laser apparatus including gas supply device and exhausting device

Excimer laser apparatus and electronic-device manufacturing method

Laser apparatus

Laser apparatus

Excimer laser apparatus and excimer laser system

Excimer laser chamber device

Laser system

Gas laser device and control method therefor

Excimer laser apparatus and excimer laser system

Laser system

Laser chamber

Laser apparatus

Laser apparatus

Extreme ultraviolet light source apparatus

Extreme ultraviolet light source device

Extreme ultraviolet light source apparatus

Method and apparatus for cleaning collector mirror in EUV light gen...

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Extreme ultraviolet light source apparatus

Patents Applicationslast 30 patents

CONTROL METHOD OF LASER SYSTEM, LASER SYSTEM, AND ELECTRONIC DEVICE...

LASER GAS REGENERATING APPARATUS AND ELECTRONIC DEVICE MANUFACTURIN...

EXCIMER LASER APPARATUS AND ELECTRONIC-DEVICE MANUFACTURING METHOD

LASER APPARATUS

LASER APPARATUS

LASER APPARATUS

EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM

LASER SYSTEM

EXCIMER LASER CHAMBER DEVICE

LASER SYSTEM

LASER CHAMBER

GAS LASER DEVICE AND CONTROL METHOD THEREFOR

EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM

LASER APPARATUS

LASER APPARATUS

METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE

METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus