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Takeshi Ashihara
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Oita, JP
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Patents Grants
last 30 patents
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Patent Grant
Polishing apparatus and polishing method
Patent number
8,078,306
Issue date
Dec 13, 2011
Ebara Corporation
Hidetaka Nakao
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Polishing apparatus and polishing method
Publication number
20090111358
Publication date
Apr 30, 2009
EBARA CORPORATION
Hidetaka Nakao
B24 - GRINDING POLISHING