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Takeshi Hirao
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Koshi-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Nozzle cleaning method and a computer-readable storage medium stori...
Patent number
8,562,753
Issue date
Oct 22, 2013
Tokyo Electron Limited
Takeshi Hirao
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Cleaning and drying-preventing method, and cleaning and drying-prev...
Patent number
8,512,478
Issue date
Aug 20, 2013
Tokyo Electron Limited
Yasuyuki Kometani
B08 - CLEANING
Information
Patent Grant
Cleaning and drying-preventing method, and cleaning and drying-prev...
Patent number
8,216,390
Issue date
Jul 10, 2012
Tokyo Electron Limited
Yasuyuki Kometani
B08 - CLEANING
Information
Patent Grant
Nozzle cleaning apparatus, nozzle cleaning method, and a computer-r...
Patent number
7,891,365
Issue date
Feb 22, 2011
Tokyo Electron Limited
Takeshi Hirao
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Process liquid supply nozzle, process liquid supply device and nozz...
Patent number
7,326,299
Issue date
Feb 5, 2008
Tokyo Electron Limited
Makoto Muramatsu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CONTAINER
Publication number
20240219839
Publication date
Jul 4, 2024
TOKYO ELECTRON LIMITED
Katsuhiro Tsuchiya
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
CLEANING AND DRYING-PREVENTING METHOD, AND CLEANING AND DRYING-PREV...
Publication number
20120255581
Publication date
Oct 11, 2012
TOKYO ELECTRON LIMITED
Yasuyuki Kometani
B08 - CLEANING
Information
Patent Application
NOZZLE CLEANING APPARATUS, NOZZLE CLEANING METHOD AND A COMPUTER-RE...
Publication number
20110083702
Publication date
Apr 14, 2011
TOKYO ELECTRON LIMITED
Takeshi Hirao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NOZZLE CLEANING APPARATUS, NOZZLE CLEANING METHOD AND A COMPUTER-RE...
Publication number
20110083703
Publication date
Apr 14, 2011
TOKYO ELECTRON LIMITED
Takeshi Hirao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING AND DRYING-PREVENTING METHOD, AND CLEANING AND DRYING-PREV...
Publication number
20100051059
Publication date
Mar 4, 2010
TOKYO ELECTRON LIMITED
Yasuyuki Kometani
B08 - CLEANING
Information
Patent Application
Nozzle cleaning apparatus, nozzle cleaning method, and a computer-r...
Publication number
20080023034
Publication date
Jan 31, 2008
Takeshi Hirao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process liquid supply nozzle, process liquid supply device and nozz...
Publication number
20040173153
Publication date
Sep 9, 2004
TOKYO ELECTRON LIMITED
Makoto Muramatsu
H01 - BASIC ELECTRIC ELEMENTS