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Takeshi Itou
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Miyagi, JP
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last 30 patents
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Patent Grant
Etching residue removal method and semiconductor device fabrication...
Patent number
7,879,533
Issue date
Feb 1, 2011
Oki Semiconductor Co., Ltd.
Takeshi Itou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Etching residue removal method and semiconductor device fabrication...
Publication number
20060254617
Publication date
Nov 16, 2006
Takeshi Itou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...