Takeshi Kamata

Follow

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for plasma treatment and apparatus for plasma treatment
- Patent number 6,060,329
- Issue date May 9, 2000
- Fujitsu Limited
- Takeshi Kamata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment method
- Patent number 5,846,885
- Issue date Dec 8, 1998
- Fujitsu Limited
- Takeshi Kamata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing with less damage
- Patent number 5,779,925
- Issue date Jul 14, 1998
- Fujitsu Limited
- Koichi Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS