Takeshi Kaneko

Person

's-Hertogenbosch, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate table, a lithographic apparatus and a method for manufact...
- Patent number 10,649,346
- Issue date May 12, 2020
- ASML Netherlands B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,591,828
- Issue date Mar 17, 2020
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and surface cleaning method
- Patent number 10,437,156
- Issue date Oct 8, 2019
- ASML Netherlands B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, a lithographic apparatus and a method for manufact...
- Patent number 10,203,612
- Issue date Feb 12, 2019
- ASML Netherlands B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,203,611
- Issue date Feb 12, 2019
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and surface cleaning method
- Patent number 10,185,223
- Issue date Jan 22, 2019
- ASML Netherlands B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and surface cleaning method
- Patent number 9,927,716
- Issue date Mar 27, 2018
- ASML Netherlands B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 9,823,589
- Issue date Nov 21, 2017
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and surface cleaning method
- Patent number 9,645,508
- Issue date May 9, 2017
- ASML Netherlands B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
- Patent number 9,625,828
- Issue date Apr 18, 2017
- ASML Netherlands B.V.
- Michel Riepen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, a lithographic apparatus and a method involving an...
- Patent number 9,488,919
- Issue date Nov 8, 2016
- ASML Netherlands B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 9,298,107
- Issue date Mar 29, 2016
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and surface cleaning method
- Patent number 9,261,796
- Issue date Feb 16, 2016
- ASML Netherlands B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and surface cleaning method
- Patent number 8,760,616
- Issue date Jun 24, 2014
- ASML Netherlands B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Shutter member, a lithographic apparatus and device manufacturing m...
- Patent number 8,599,356
- Issue date Dec 3, 2013
- ASML Netherlands B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling device, an immersion lithographic apparatus and a de...
- Patent number 8,416,388
- Issue date Apr 9, 2013
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
RADAR DETECTION USING PRIOR TRACKED OBJECT INFORMATION
- Publication number 20250044439
- Publication date Feb 6, 2025
- NXP B.V.
- Lu Lu Chan
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD FOR MANUFACT...
- Publication number 20190243256
- Publication date Aug 8, 2019
- ASML NETHERLANDS B.V.
- Takeshi KANEKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20190171113
- Publication date Jun 6, 2019
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD
- Publication number 20190094707
- Publication date Mar 28, 2019
- ASML NETHERLANDS B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD
- Publication number 20180210348
- Publication date Jul 26, 2018
- ASML NETHERLANDS B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20180074411
- Publication date Mar 15, 2018
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD
- Publication number 20170255107
- Publication date Sep 7, 2017
- ASML NETHERLANDS B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD FOR MANUFACT...
- Publication number 20170052459
- Publication date Feb 23, 2017
- ASML NETHERLANDS B.V.
- Takeshi KANEKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD
- Publication number 20160209760
- Publication date Jul 21, 2016
- ASML NETHERLANDS B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20160202618
- Publication date Jul 14, 2016
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD
- Publication number 20140362355
- Publication date Dec 11, 2014
- ASML NETHERLANDS B.V.
- Takeshi Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20120013865
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD FOR MANUFACT...
- Publication number 20110199601
- Publication date Aug 18, 2011
- ASML NETHERLANDS B.V.
- Takeshi KANEKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
- Publication number 20110194084
- Publication date Aug 11, 2011
- ASML NETHERLANDS B.V.
- Michel RIEPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD
- Publication number 20110128516
- Publication date Jun 2, 2011
- ASML NETHERLANDS B.V.
- Takeshi KANEKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SHUTTER MEMBER, A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
- Publication number 20110096305
- Publication date Apr 28, 2011
- ASML NETHERLANDS B.V.
- Takeshi KANEKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION CALIBRATION OF ALIGNMENT HEADS IN A MULTI-HEAD ALIGNMENT S...
- Publication number 20110013165
- Publication date Jan 20, 2011
- ASML NETHERLANDS B.V.
- Takeshi KANEKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING DEVICE, AN IMMERSION LITHOGRAPHIC APPARATUS AND A DE...
- Publication number 20100259735
- Publication date Oct 14, 2010
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takeshi Kaneko

Person

Patents Grantslast 30 patents

Substrate table, a lithographic apparatus and a method for manufact...

Lithographic apparatus and method

Lithographic apparatus and surface cleaning method

Substrate table, a lithographic apparatus and a method for manufact...

Lithographic apparatus and method

Lithographic apparatus and surface cleaning method

Lithographic apparatus and surface cleaning method

Lithographic apparatus and method

Lithographic apparatus and surface cleaning method

Fluid handling structure, lithographic apparatus and device manufac...

Substrate table, a lithographic apparatus and a method involving an...

Lithographic apparatus and method

Lithographic apparatus and surface cleaning method

Lithographic apparatus and surface cleaning method

Shutter member, a lithographic apparatus and device manufacturing m...

Fluid handling device, an immersion lithographic apparatus and a de...

Patents Applicationslast 30 patents

RADAR DETECTION USING PRIOR TRACKED OBJECT INFORMATION

SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD FOR MANUFACT...

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD

LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD

SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD FOR MANUFACT...

LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD

LITHOGRAPHIC APPARATUS AND METHOD

SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD FOR MANUFACT...

FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...

LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD

SHUTTER MEMBER, A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...

POSITION CALIBRATION OF ALIGNMENT HEADS IN A MULTI-HEAD ALIGNMENT S...

FLUID HANDLING DEVICE, AN IMMERSION LITHOGRAPHIC APPARATUS AND A DE...