Takeshi KASAI

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 11,293,096
- Issue date Apr 5, 2022
- Kokusai Electric Corporation
- Atsushi Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, liquid precursor replenishment syst...
- Patent number 10,876,207
- Issue date Dec 29, 2020
- Kokusai Electric Corporation
- Noriyuki Isobe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, exhaust system and method of manufa...
- Patent number 10,163,663
- Issue date Dec 25, 2018
- Kokusai Electric Corporation
- Toshihiko Yonejima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,708,708
- Issue date Jul 18, 2017
- Hitachi Kokusai Electric, Inc.
- Noriyuki Isobe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20220186368
- Publication date Jun 16, 2022
- Hitachi Kokusai Electric Inc.
- Atsushi MORIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, LIQUID PRECURSOR REPLENISHMENT SYST...
- Publication number 20190211449
- Publication date Jul 11, 2019
- Hitachi Kokusai Electric Inc.
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, EXHAUST SYSTEM AND METHOD OF MANUFA...
- Publication number 20180144953
- Publication date May 24, 2018
- Hitachi Kokusai Electric Inc.
- Toshihiko YONEJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20180135176
- Publication date May 17, 2018
- Hitachi Kokusai Electric Inc.
- Atsushi MORIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20170067159
- Publication date Mar 9, 2017
- Hitachi Kokusai Electric Inc.
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Takeshi KASAI

Person

Patents Grantslast 30 patents

Vaporizer, substrate processing apparatus and method for manufactur...

Substrate processing apparatus, method for manufacturing semiconduc...

Substrate processing apparatus, liquid precursor replenishment syst...

Substrate processing apparatus, exhaust system and method of manufa...

Method of manufacturing semiconductor device

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING APPARATUS, LIQUID PRECURSOR REPLENISHMENT SYST...

SUBSTRATE PROCESSING APPARATUS, EXHAUST SYSTEM AND METHOD OF MANUFA...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

Method of Manufacturing Semiconductor Device