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Kokubunji, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Ion pump and charged particle beam device using the same
Patent number
9,837,243
Issue date
Dec 5, 2017
Hitachi, Ltd.
Keigo Kasuya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multipole and charged particle radiation apparatus using the same
Patent number
9,343,260
Issue date
May 17, 2016
Hitachi High-Technologies Corporation
Kotoko Urano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning charged particle beam device and method for correcting chr...
Patent number
8,772,732
Issue date
Jul 8, 2014
Hitachi High-Technologies Corporation
Tomonori Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and geometrical aberration measurem...
Patent number
8,581,190
Issue date
Nov 12, 2013
Hitachi High-Technologies Corporation
Tomonori Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus including aberration corrector
Patent number
8,558,171
Issue date
Oct 15, 2013
Hitachi High-Technologies Corporation
Kotoko Hirose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus of tilted illumination observation
Patent number
8,436,899
Issue date
May 7, 2013
Hitachi High-Technologies Corporation
Takeshi Kawasaki
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle radiation device provided with aberration corrector
Patent number
8,258,475
Issue date
Sep 4, 2012
Hitachi High-Technologies Corporation
Kotoko Hirose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
8,168,951
Issue date
May 1, 2012
Hitachi High-Technologies Corporation
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus including aberration corrector
Patent number
8,129,680
Issue date
Mar 6, 2012
Hitachi High-Technologies Corporation
Kotoko Hirose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for estimation of probe shape in charged particle beam instr...
Patent number
7,915,582
Issue date
Mar 29, 2011
Hitachi High-Technologies Corporation
Kotoko Hirose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Corrector for charged-particle beam aberration and charged-particle...
Patent number
7,872,240
Issue date
Jan 18, 2011
Hitachi High-Technologies Corporation
Hiroyuki Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration corrector and charged particle beam apparatus using the...
Patent number
7,834,326
Issue date
Nov 16, 2010
Hitachi High-Technologies Corporation
Takeshi Kawasaki
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam apparatus with aberration corrector
Patent number
7,825,377
Issue date
Nov 2, 2010
Hitachi High-Technologies Corporation
Takeshi Kawasaki
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Corrector for charged-particle beam aberration and charged-particle...
Patent number
7,737,413
Issue date
Jun 15, 2010
Hitachi High-Technologies Corporation
Hiroyuki Ito
Information
Patent Grant
Charged particle beam apparatus
Patent number
7,718,976
Issue date
May 18, 2010
Hitachi High-Technologies Corporation
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus, aberration correction value calcul...
Patent number
7,714,286
Issue date
May 11, 2010
Hitachi High-Technologies Corporation
Tomonori Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam column
Patent number
7,531,799
Issue date
May 12, 2009
Hitachi High-Technologies Corporation
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
7,521,675
Issue date
Apr 21, 2009
Hitachi High-Technologies Corporation
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
7,504,624
Issue date
Mar 17, 2009
Hitachi High-Technologies Corporation
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus with aberration corrector
Patent number
7,375,323
Issue date
May 20, 2008
Hitachi High-Technologies Corporation
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam column
Patent number
7,223,983
Issue date
May 29, 2007
Hitachi High-Technologies Corporation
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chromatic aberration corrector for charged particles and charged-pa...
Patent number
7,211,804
Issue date
May 1, 2007
Hitachi High-Technologies Corporation
Takaho Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus with aberration corrector
Patent number
7,199,365
Issue date
Apr 3, 2007
Hitachi High-Technologies Corporations
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus with aberration corrector
Patent number
6,982,427
Issue date
Jan 3, 2006
Hitachi High-Technologies Corporation
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam generating apparatus of multi-stage accelerat...
Patent number
5,059,859
Issue date
Oct 22, 1991
Hitachi, Ltd.
Junji Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Field emission electron gun system
Patent number
4,945,247
Issue date
Jul 31, 1990
Hitachi, Ltd.
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ION PUMP AND CHARGED PARTICLE BEAM DEVICE USING THE SAME
Publication number
20160233050
Publication date
Aug 11, 2016
Hitachi, Ltd
Keigo KASUYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPOLE AND CHARGED PARTICLE RADIATION APPARATUS USING THE SAME
Publication number
20130320227
Publication date
Dec 5, 2013
Hitachi High-Technologies Corporation
Kotoko Urano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE PROVIDED WITH AUTOMATIC ABERRATION COR...
Publication number
20130068949
Publication date
Mar 21, 2013
Kotoko Urano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING CHR...
Publication number
20120199739
Publication date
Aug 9, 2012
Hitachi High-Technologies Corporation
Tomonori Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS INCLUDING ABERRATION CORRECTOR
Publication number
20120153146
Publication date
Jun 21, 2012
Hitachi High-Technologies Corporation
Kotoko HIROSE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE RADIATION DEVICE PROVIDED WITH ABERRATION CORRECTOR
Publication number
20110272578
Publication date
Nov 10, 2011
Hitachi High-Technologies Corporation
Kotoko Hirose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM INSTRUMENT COMPRISING AN ABERRATION CORRECTOR
Publication number
20110210248
Publication date
Sep 1, 2011
Hitachi High-Technologies Corporation
Kotoko HIROSE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND GEOMETRICAL ABERRATION MEASUREM...
Publication number
20110139980
Publication date
Jun 16, 2011
Hitachi High-Technologies Corporation
Tomonori Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ESTIMATION OF PROBE SHAPE IN CHARGED PARTICLE BEAM INSTR...
Publication number
20100264309
Publication date
Oct 21, 2010
Kotoko HIROSE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus of Tilted Illumination Observation
Publication number
20100033560
Publication date
Feb 11, 2010
Hitachi High-Technologies Corporation
Takeshi Kawasaki
G01 - MEASURING TESTING
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS INCLUDING ABERRATION CORRECTOR
Publication number
20090212228
Publication date
Aug 27, 2009
Kotoko HIROSE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20090184243
Publication date
Jul 23, 2009
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE...
Publication number
20090039281
Publication date
Feb 12, 2009
Takeshi KAWASAKI
G01 - MEASURING TESTING
Information
Patent Application
CORRECTOR FOR CHARGED-PARTICLE BEAM ABERRATION AND CHARGED-PARTICLE...
Publication number
20090032722
Publication date
Feb 5, 2009
Hitachi High-Technologies Corporation
Hiroyuki Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS, ABERRATION CORRECTION VALUE CALCUL...
Publication number
20090008550
Publication date
Jan 8, 2009
Tomonori Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron beam apparatus with aberration corrector
Publication number
20090008551
Publication date
Jan 8, 2009
Hitachi High-Technologies Corporation
Takeshi Kawasaki
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20080067378
Publication date
Mar 20, 2008
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged particle beam column
Publication number
20070221860
Publication date
Sep 27, 2007
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron beam apparatus with aberration corrector
Publication number
20070114409
Publication date
May 24, 2007
Hitachi High-Technologies Corporation
Takeshi Kawasaki
B82 - NANO-TECHNOLOGY
Information
Patent Application
Charged particle beam device
Publication number
20060255269
Publication date
Nov 16, 2006
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged particle beam apparatus
Publication number
20060175548
Publication date
Aug 10, 2006
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged particle beam column
Publication number
20060033037
Publication date
Feb 16, 2006
Takeshi Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron beam apparatus with aberration corrector
Publication number
20060016991
Publication date
Jan 26, 2006
Hitachi High-Technologies Corporation
Takeshi Kawasaki
B82 - NANO-TECHNOLOGY
Information
Patent Application
Chromatic aberration corrector for charged particles and charged-pa...
Publication number
20050104006
Publication date
May 19, 2005
Takaho Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron beam apparatus with aberration corrector
Publication number
20040188635
Publication date
Sep 30, 2004
Hitachi High-Technologies Corporation
Takeshi Kawasaki
B82 - NANO-TECHNOLOGY