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Takeshi Kobayashi
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Iwate, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma generating apparatus, plasma processing apparatus, and plasm...
Patent number
12,131,889
Issue date
Oct 29, 2024
Tokyo Electron Limited
Takeshi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ignition method and plasma processing apparatus
Patent number
12,080,517
Issue date
Sep 3, 2024
Tokyo Electron Limited
Takeshi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature measurement system, temperature measurement method, and...
Patent number
11,972,921
Issue date
Apr 30, 2024
Tokyo Electron Limited
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing method, plasma processing apparatus, and control...
Patent number
11,901,158
Issue date
Feb 13, 2024
Tokyo Electron Limited
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetic drive apparatus and magnetizing method
Patent number
11,702,746
Issue date
Jul 18, 2023
Tokyo Electron Limited
Takeshi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,674,225
Issue date
Jun 13, 2023
Tokyo Electron Limted
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate holding mechanism and substrate processing apparatus
Patent number
11,664,201
Issue date
May 30, 2023
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Rotation detection jig, substrate processing apparatus and method o...
Patent number
11,572,625
Issue date
Feb 7, 2023
Tokyo Electron Limited
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Rotation angle detection apparatus and rotation angle detection met...
Patent number
11,422,008
Issue date
Aug 23, 2022
Tokyo Electron Limited
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film formation apparatus
Patent number
11,136,669
Issue date
Oct 5, 2021
TOKYO ELECTRON LIMIIED
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method
Patent number
11,118,267
Issue date
Sep 14, 2021
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma generating apparatus, plasma processing apparatus, and metho...
Patent number
10,643,824
Issue date
May 5, 2020
Tokyo Electron Limited
Takeshi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
10,584,416
Issue date
Mar 10, 2020
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing device and operation method
Patent number
10,103,009
Issue date
Oct 16, 2018
Tokyo Electron Limited
Shigehiro Miura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ready for rotation state detection device, method of detecting read...
Patent number
10,002,417
Issue date
Jun 19, 2018
Tokyo Electron Limited
Kiichi Takahashi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Film formation device, substrate processing device, and film format...
Patent number
9,583,312
Issue date
Feb 28, 2017
Tokyo Electron Limited
Jun Yamawaku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus, plasma processing method, and recordin...
Patent number
9,583,318
Issue date
Feb 28, 2017
Tokyo Electron Limited
Shigehiro Miura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing device and operation method
Patent number
9,376,751
Issue date
Jun 28, 2016
Tokyo Electron Limited
Shigehiro Miura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film deposition apparatus, substrate processing apparatus and film...
Patent number
9,111,747
Issue date
Aug 18, 2015
Tokyo Electron Limited
Jun Yamawaku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240387144
Publication date
Nov 21, 2024
TOKYO ELECTRON LIMITED
Takeshi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IGNITION CONTROL METHOD, FILM FORMATION METHOD, AND SUBSTRATE PROCE...
Publication number
20240312763
Publication date
Sep 19, 2024
TOKYO ELECTRON LIMITED
Takeshi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MONITORING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240006163
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230402256
Publication date
Dec 14, 2023
TOKYO ELECTRON LIMITED
Takashi CHIBA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IGNITION CONTROL METHOD, FILM FORMING METHOD, AND FILM FORMING APPA...
Publication number
20230235460
Publication date
Jul 27, 2023
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IGNITION CONTROLLING METHOD, FILM FORMING METHOD, AND FILM FORMING...
Publication number
20230129976
Publication date
Apr 27, 2023
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND FILM FORMING METHOD
Publication number
20230053083
Publication date
Feb 16, 2023
TOKYO ELECTRON LIMITED
Hiroyuki MATSUURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IGNITION METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220293394
Publication date
Sep 15, 2022
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CONTROLLING ROTARY TABLE AND PROCESSING APPARATUS
Publication number
20220275508
Publication date
Sep 1, 2022
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA GENERATING APPARATUS, PLASMA PROCESSING APPARATUS, AND PLASM...
Publication number
20220122812
Publication date
Apr 21, 2022
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD, PLASMA PROCESSING APPARATUS, AND CONTROL...
Publication number
20210351010
Publication date
Nov 11, 2021
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20210351005
Publication date
Nov 11, 2021
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HOLDING MECHANISM AND SUBSTRATE PROCESSING APPARATUS
Publication number
20210249235
Publication date
Aug 12, 2021
TOKYO ELECTRON LIMITED
Hitoshi KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE MEASUREMENT SYSTEM, TEMPERATURE MEASUREMENT METHOD, AND...
Publication number
20210151285
Publication date
May 20, 2021
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
G01 - MEASURING TESTING
Information
Patent Application
MAGNETIC DRIVE APPARATUS, MAGNETIZING METHOD, AND METHOD OF MANUFAC...
Publication number
20200370176
Publication date
Nov 26, 2020
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Rotation Angle Detection Apparatus and Rotation Angle Detection Met...
Publication number
20200116528
Publication date
Apr 16, 2020
TOKYO ELECTRON LIMITED
Takeshi KOBAYASHI
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20190360093
Publication date
Nov 28, 2019
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film Formation Apparatus
Publication number
20190186004
Publication date
Jun 20, 2019
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ROTATION DETECTION JIG, SUBSTRATE PROCESSING APPARATUS AND METHOD O...
Publication number
20180251892
Publication date
Sep 6, 2018
TOKYO ELECTRON LIMITED
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus
Publication number
20180195173
Publication date
Jul 12, 2018
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA GENERATING APPARATUS, PLASMA PROCESSING APPARATUS, AND METHO...
Publication number
20180096826
Publication date
Apr 5, 2018
TOKYO ELECTRON LIMITED
Takeshi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Antenna Device, Plasma Generating Device Using the Same, and Plasma...
Publication number
20180073146
Publication date
Mar 15, 2018
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20170218514
Publication date
Aug 3, 2017
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND RECORDIN...
Publication number
20160293390
Publication date
Oct 6, 2016
TOKYO ELECTRON LIMITED
Shigehiro MIURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING DEVICE AND OPERATION METHOD
Publication number
20160268105
Publication date
Sep 15, 2016
TOKYO ELECTRON LIMITED
Shigehiro MIURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING DEVICE AND OPERATION METHOD
Publication number
20150235813
Publication date
Aug 20, 2015
TOKYO ELECTRON LIMITED
Shigehiro MIURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE EJECTION DETECTION DEVICE, METHOD OF DETECTING SUBSTRATE...
Publication number
20140345523
Publication date
Nov 27, 2014
TOKYO ELECTRON LIMITED
Hitoshi KIKUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
READY FOR ROTATION STATE DETECTION DEVICE, METHOD OF DETECTING READ...
Publication number
20140347465
Publication date
Nov 27, 2014
TOKYO ELECTRON LIMITED
Kiichi TAKAHASHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF DEPOSITING A FILM
Publication number
20140220260
Publication date
Aug 7, 2014
TOKYO ELECTRON LIMITED
Jun Yamawaku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION DEVICE, SUBSTRATE PROCESSING DEVICE, AND FILM FORMAT...
Publication number
20140170859
Publication date
Jun 19, 2014
TOKYO ELECTRON LIMITED
Jun YAMAWAKU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...