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Takeshi Kodera
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Tokyo, JP
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last 30 patents
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Patent Grant
Apparatus for cleaning a polishing surface, polishing apparatus, an...
Patent number
10,661,411
Issue date
May 26, 2020
Ebara Corporation
Ryuichi Kosuge
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
APPARATUS FOR CLEANING A POLISHING SURFACE, POLISHING APPARATUS, AN...
Publication number
20160144478
Publication date
May 26, 2016
EBARA CORPORATION
Ryuichi Kosuge
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR