Takeshi KUMAGAI

Person

Iwate, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film deposition method and computer program storage medium
- Patent number 11,118,265
- Issue date Sep 14, 2021
- Tokyo Electron Limited
- Shigenori Ozaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and film deposition apparatus
- Patent number 10,590,534
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a protective film
- Patent number 10,458,016
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method for producing a reaction product on a substrate
- Patent number 9,677,174
- Issue date Jun 13, 2017
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 9,551,068
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing a film
- Patent number 9,441,291
- Issue date Sep 13, 2016
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a silicon oxide film
- Patent number 9,368,341
- Issue date Jun 14, 2016
- Tokyo Electron Limited
- Tatsuya Tamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a silicon oxide film
- Patent number 9,293,321
- Issue date Mar 22, 2016
- Tokyo Electron Limited
- Tatsuya Tamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method
- Patent number 9,023,738
- Issue date May 5, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method
- Patent number 8,932,963
- Issue date Jan 13, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 8,906,246
- Issue date Dec 9, 2014
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus, film deposition method, and computer rea...
- Patent number 8,882,916
- Issue date Nov 11, 2014
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle reducing method
- Patent number 8,853,097
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method
- Patent number 8,835,332
- Issue date Sep 16, 2014
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and film deposition apparatus
- Patent number 8,642,487
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon nitride film forming method, silicon nitride film forming s...
- Patent number 7,156,923
- Issue date Jan 2, 2007
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD method and device for forming silicon-containing insulation film
- Patent number 7,125,812
- Issue date Oct 24, 2006
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precleaning method of precleaning a silicon nitride film forming sy...
- Patent number 6,844,273
- Issue date Jan 18, 2005
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM DEPOSITION METHOD AND COMPUTER PROGRAM STORAGE MEDIUM
- Publication number 20180080123
- Publication date Mar 22, 2018
- TOKYO ELECTRON LIMITED
- Shigenori OZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A PROTECTIVE FILM
- Publication number 20170182514
- Publication date Jun 29, 2017
- TOKYO ELECTRON LIMITED
- Takeshi KUMAGAI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
- Publication number 20170175266
- Publication date Jun 22, 2017
- TOKYO ELECTRON LIMITED
- Takeshi KUMAGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A FILM
- Publication number 20150322568
- Publication date Nov 12, 2015
- TOKYO ELECTRON LIMITED
- Takeshi KUMAGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20150315705
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Takeshi KUMAGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...
- Publication number 20150184294
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SILICON OXIDE FILM
- Publication number 20150079808
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Tatsuya TAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SILICON OXIDE FILM
- Publication number 20150079807
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Tatsuya TAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER REA...
- Publication number 20150024143
- Publication date Jan 22, 2015
- TOKYO ELECTRON LIMITED
- Takeshi KUMAGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD
- Publication number 20140370205
- Publication date Dec 18, 2014
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD
- Publication number 20140349032
- Publication date Nov 27, 2014
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD
- Publication number 20140011372
- Publication date Jan 9, 2014
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE REDUCING METHOD AND FILM DEPOSITION METHOD
- Publication number 20130189849
- Publication date Jul 25, 2013
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD
- Publication number 20130164942
- Publication date Jun 27, 2013
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
- Publication number 20130130512
- Publication date May 23, 2013
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20120267341
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20120222615
- Publication date Sep 6, 2012
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER PRO...
- Publication number 20120052693
- Publication date Mar 1, 2012
- TOKYO ELECTRON LIMITED
- Shigenori OZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER REA...
- Publication number 20110236598
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Takeshi KUMAGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...
- Publication number 20110159188
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND STORAGE MEDIUM
- Publication number 20110104395
- Publication date May 5, 2011
- TOKYO ELECTRON LIMITED
- Takeshi KUMAGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd method and device for forming silicon-containing insulation film
- Publication number 20050095770
- Publication date May 5, 2005
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon nitride film forming method, silicon nitride film forming s...
- Publication number 20050081789
- Publication date Apr 21, 2005
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon nitride film forming method, silicon nitride film forming s...
- Publication number 20020106909
- Publication date Aug 8, 2002
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming oxynitride film or the like and system for carryi...
- Publication number 20010046792
- Publication date Nov 29, 2001
- Yutaka Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Takeshi KUMAGAI

Person

Patents Grantslast 30 patents

Film deposition method and computer program storage medium

Film deposition method and film deposition apparatus

Method for forming a protective film

Film deposition method for producing a reaction product on a substrate

Film forming method and film forming apparatus

Method of depositing a film

Method of manufacturing a silicon oxide film

Method of manufacturing a silicon oxide film

Film deposition method

Film deposition method

Film deposition apparatus and film deposition method

Film deposition apparatus, film deposition method, and computer rea...

Particle reducing method

Film deposition method

Film deposition method and film deposition apparatus

Silicon nitride film forming method, silicon nitride film forming s...

CVD method and device for forming silicon-containing insulation film

Precleaning method of precleaning a silicon nitride film forming sy...

Patents Applicationslast 30 patents

FILM DEPOSITION METHOD AND COMPUTER PROGRAM STORAGE MEDIUM

METHOD FOR FORMING A PROTECTIVE FILM

FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS

METHOD OF DEPOSITING A FILM

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...

METHOD OF MANUFACTURING A SILICON OXIDE FILM

METHOD OF MANUFACTURING A SILICON OXIDE FILM

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER REA...

FILM DEPOSITION METHOD

FILM DEPOSITION METHOD

FILM DEPOSITION METHOD

PARTICLE REDUCING METHOD AND FILM DEPOSITION METHOD

FILM DEPOSITION METHOD

FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

FILM DEPOSITION APPARATUS

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER PRO...

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER REA...

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND STORAGE MEDIUM

Cvd method and device for forming silicon-containing insulation film

Silicon nitride film forming method, silicon nitride film forming s...

Silicon nitride film forming method, silicon nitride film forming s...

Method of forming oxynitride film or the like and system for carryi...