Takeshi Kuroda

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Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Drying apparatus and method using IPA of a semiconductor wafer
- Patent number 6,032,382
- Issue date Mar 7, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Akinori Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drying apparatus and method
- Patent number 5,996,242
- Issue date Dec 7, 1999
- Ryoden Semiconductor System Engineering Corporation
- Akinori Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drying apparatus for processing surface of substrate
- Patent number 5,956,859
- Issue date Sep 28, 1999
- Ryoden Semiconductor System Emgineering Corporation
- Akinori Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Washing apparatus and method therefor
- Patent number 5,746,233
- Issue date May 5, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Takeshi Kuroda
- B08 - CLEANING