Takeshi Matsumoto

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,194,594
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Nobutaka Fukunaga
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 9,396,978
- Issue date Jul 19, 2016
- Tokyo Electron Limited
- Takeshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method and storag...
- Patent number 8,588,952
- Issue date Nov 19, 2013
- Tokyo Electron Limited
- Kenichirou Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,560,108
- Issue date Oct 15, 2013
- Tokyo Electron Limited
- Kenichirou Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus, coating and developing method, an...
- Patent number 8,306,646
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Tomohiro Kaneko
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220402094
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Nobutaka FUKUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220402087
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Nobutaka FUKUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS, PROCESSING METHOD AND COMPUTER- READABLE RECO...
- Publication number 20210362290
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Tomohiro KANEKO
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20120271444
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Takeshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20110206486
- Publication date Aug 25, 2011
- TOKYO ELECTRON LIMITED
- Kenichirou MATSUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD AND STORAG...
- Publication number 20110208344
- Publication date Aug 25, 2011
- TOKYO ELECTRON LIMITED
- Kenichirou MATSUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...
- Publication number 20090299515
- Publication date Dec 3, 2009
- TOKYO ELECTRON LIMITED
- Tomohiro Kaneko
- G05 - CONTROLLING REGULATING

Takeshi Matsumoto

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Substrate processing apparatus, substrate processing method and sto...

Substrate processing system, substrate processing method and storag...

Substrate processing apparatus and substrate processing method

Coating and developing apparatus, coating and developing method, an...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PROCESSING APPARATUS, PROCESSING METHOD AND COMPUTER- READABLE RECO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD AND STORAG...

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...