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Takeshi Nakajima
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Optical apparatus, exposure apparatus, method of manufacturing opti...
Patent number
10,539,879
Issue date
Jan 21, 2020
Canon Kabushiki Kaisha
Takeshi Nakajima
G02 - OPTICS
Information
Patent Grant
Projection optical system, exposure apparatus, and device manufactu...
Patent number
10,495,978
Issue date
Dec 3, 2019
Canon Kabushiki Kaisha
Yasuhito Sasaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
OPTICAL APPARATUS, EXPOSURE APPARATUS, METHOD OF MANUFACTURING OPTI...
Publication number
20190332016
Publication date
Oct 31, 2019
Canon Kabushiki Kaisha
Takeshi Nakajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTU...
Publication number
20170315448
Publication date
Nov 2, 2017
Canon Kabushiki Kaisha
Yasuhito Sasaki
G02 - OPTICS