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Takeshi Oyama

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  • Yamanashi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20230335394
    • Publication date Oct 19, 2023
    • TOKYO ELECTRON LIMITED
    • Kiwamu ITO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING FILM AND PROCESSING APPARATUS
    • Publication number 20220238335
    • Publication date Jul 28, 2022
    • TOKYO ELECTRON LIMITED
    • Takeshi OYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESSING METHOD
    • Publication number 20210130950
    • Publication date May 6, 2021
    • TOKYO ELECTRON LIMITED
    • Hideomi HANE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20210054501
    • Publication date Feb 25, 2021
    • TOKYO ELECTRON LIMITED
    • Hideomi HANE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20210054502
    • Publication date Feb 25, 2021
    • TOKYO ELECTRON LIMITED
    • Hideomi HANE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CLEANING METHOD OF DEPOSITION APPARATUS
    • Publication number 20200299835
    • Publication date Sep 24, 2020
    • TOKYO ELECTRON LIMITED
    • Jun OGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20200294787
    • Publication date Sep 17, 2020
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING METHOD AND FILM-FORMING APPARATUS
    • Publication number 20190292662
    • Publication date Sep 26, 2019
    • TOKYO ELECTRON LIMITED
    • Hideomi HANE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND OPERATION METHOD OF FILM FORMING APPARATUS
    • Publication number 20190127849
    • Publication date May 2, 2019
    • TOKYO ELECTRON LIMITED
    • Hideomi HANE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Method, Film Forming Apparatus, and Storage Medium
    • Publication number 20180366315
    • Publication date Dec 20, 2018
    • TOKYO ELECTRON LIMITED
    • Hideomi Hane
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20180358235
    • Publication date Dec 13, 2018
    • TOKYO ELECTRON LIMITED
    • Hideomi HANE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20180245216
    • Publication date Aug 30, 2018
    • TOKYO ELECTRON LIMITED
    • Jun OGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SILICON NITRIDE FILM FORMING METHOD AND SILICON NITRIDE FILM FORMIN...
    • Publication number 20180037992
    • Publication date Feb 8, 2018
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Method and Film Forming Apparatus
    • Publication number 20170271143
    • Publication date Sep 21, 2017
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING NITRIDE FILM
    • Publication number 20170218517
    • Publication date Aug 3, 2017
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Methd and Film Forming Apparatus
    • Publication number 20170221703
    • Publication date Aug 3, 2017
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20160189950
    • Publication date Jun 30, 2016
    • TOKYO ELECTRON LIMITED
    • Takeshi Oyama
    • H01 - BASIC ELECTRIC ELEMENTS