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Takeshi Oyamada
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Takasaki, JP
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last 30 patents
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Patent Grant
Conical-frustum sputtering target and magnetron sputtering apparatus
Patent number
4,747,926
Issue date
May 31, 1988
Hitachi, Ltd.
Tamotsu Shimizu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Target for sputtering
Patent number
4,610,774
Issue date
Sep 9, 1986
Hitachi, Ltd.
Masao Sakata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...