Takeshi Rokukawa

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Interferometer system, lithography apparatus, and article manufactu...
- Patent number 9,804,510
- Issue date Oct 31, 2017
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
INTERFEROMETER SYSTEM, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...
- Publication number 20140198307
- Publication date Jul 17, 2014
- Zenichi Hamaya
- G01 - MEASURING TESTING