Takeshi SAIKUSA

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Koshi-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of adjusting substrate pr...
- Patent number 11,476,136
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal treatment apparatus, thermal treatment method, and non-tran...
- Patent number 11,087,983
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Eiichi Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating apparatus and substrate processing apparatus
- Patent number 10,886,151
- Issue date Jan 5, 2021
- Tokyo Electron Limited
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of adjusting substrate pr...
- Patent number 10,504,757
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Kenichi Shigetomi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...
- Publication number 20200066559
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Kenichi SHIGETOMI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEATING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180218925
- Publication date Aug 2, 2018
- TOKYO ELECTRON LIMITED
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL TREATMENT APPARATUS, THERMAL TREATMENT METHOD, AND NON-TRAN...
- Publication number 20180182611
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Eiichi SEKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...
- Publication number 20170170040
- Publication date Jun 15, 2017
- TOKYO ELECTRON LIMITED
- Kenichi SHIGETOMI
- H01 - BASIC ELECTRIC ELEMENTS