Takeshi SAKAMOTO

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Chino, JP

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Patents Grantslast 30 patents

Information Patent Grant
Base surface processing method and MEMS device
- Patent number 8,679,360
- Issue date Mar 25, 2014
- Seiko Epson Corporation
- Takeshi Sakamoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
BASE SURFACE PROCESSING METHOD AND MEMS DEVICE
- Publication number 20120251783
- Publication date Oct 4, 2012
- SEIKO EPSON CORPORATION
- Takeshi SAKAMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY