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Takeshi SASAMI
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Joetsu-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Resist composition and patterning process
Patent number
11,609,497
Issue date
Mar 21, 2023
Shin-Etsu Chemical Co., Ltd.
Takeshi Sasami
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Patterning process
Patent number
11,327,400
Issue date
May 10, 2022
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition, patterning process, and barium salt
Patent number
11,163,232
Issue date
Nov 2, 2021
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Resist composition and patterning process
Patent number
11,156,916
Issue date
Oct 26, 2021
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and patterning process
Patent number
10,520,809
Issue date
Dec 31, 2019
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and patterning process
Patent number
10,474,030
Issue date
Nov 12, 2019
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Resist composition, patterning process, and barium, cesium and ceri...
Patent number
10,078,264
Issue date
Sep 18, 2018
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Fluorinated ester monomer, making method, fluorinated ester polymer...
Patent number
9,261,783
Issue date
Feb 16, 2016
Shin-Etsu Chemical Co., Ltd.
Takeshi Kinsho
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Fluorinated monomer, polymer, resist composition, and patterning pr...
Patent number
9,115,074
Issue date
Aug 25, 2015
Shin-Etsu Chemical Co., Ltd.
Masayoshi Sagehashi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Resist composition and patterning process
Patent number
8,916,331
Issue date
Dec 23, 2014
Shin-Etsu Chemical Co., Ltd.
Koji Hasegawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chemically amplified positive resist composition for ArF immersion...
Patent number
8,815,492
Issue date
Aug 26, 2014
Shin-Etsu Chemical Co., Ltd.
Youichi Ohsawa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Fluorinated ester monomer, making method, fluorinated ester polymer...
Patent number
8,697,903
Issue date
Apr 15, 2014
Shin-Etsu Chemical Co., Ltd.
Takeshi Kinsho
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Fluorinated monomer, polymer, resist composition, and patterning pr...
Patent number
8,647,808
Issue date
Feb 11, 2014
Shin-Etsu Chemical Co., Ltd.
Masayoshi Sagehashi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Polymer, resist composition, and patterning process
Patent number
8,420,292
Issue date
Apr 16, 2013
Shin-Etsu Chemical Co., Ltd.
Yuji Harada
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
RESIST COMPOSITION AND PATTERNING PROCESS
Publication number
20200218154
Publication date
Jul 9, 2020
Shin-Etsu Chemical Co., Ltd.
Takeshi SASAMI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIST COMPOSITION AND PATTERNING PROCESS
Publication number
20190324368
Publication date
Oct 24, 2019
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNING PROCESS
Publication number
20190163065
Publication date
May 30, 2019
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION, PATTERNING PROCESS, AND BARIUM SALT
Publication number
20190113846
Publication date
Apr 18, 2019
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND PATTERNING PROCESS
Publication number
20180101094
Publication date
Apr 12, 2018
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIST COMPOSITION AND PATTERNING PROCESS
Publication number
20180088463
Publication date
Mar 29, 2018
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
Publication number
20150268555
Publication date
Sep 24, 2015
Shin-Etsu Chemical Co., Ltd.
Kenji FUNATSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUORINATED MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PR...
Publication number
20140114080
Publication date
Apr 24, 2014
Shin-Etsu Chemical Co., Ltd.
Masayoshi SAGEHASHI
C07 - ORGANIC CHEMISTRY
Information
Patent Application
FLUORINATED ESTER MONOMER, MAKING METHOD, FLUORINATED ESTER POLYMER...
Publication number
20140051024
Publication date
Feb 20, 2014
Shin-Etsu Chemical Co., Ltd.
Takeshi KINSHO
C07 - ORGANIC CHEMISTRY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION FOR ArF IMMERSION...
Publication number
20130108964
Publication date
May 2, 2013
Shin-Etsu Chemical Co., Ltd.
Youichi Ohsawa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION FOR ArF IMMERSION...
Publication number
20130034813
Publication date
Feb 7, 2013
Shin-Etsu Chemical Co., Ltd.
Youichi Ohsawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND PATTERNING PROCESS
Publication number
20120148945
Publication date
Jun 14, 2012
Shin-Etsu Chemical Co., Ltd.
Koji Hasegawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUORINATED ESTER MONOMER, MAKING METHOD, FLUORINATED ESTER POLYMER...
Publication number
20120083580
Publication date
Apr 5, 2012
Takeshi KINSHO
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
FLUORINATED MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PR...
Publication number
20110250539
Publication date
Oct 13, 2011
Masayoshi SAGEHASHI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
Publication number
20110177455
Publication date
Jul 21, 2011
Yuji HARADA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...