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Takeshi SHIMOAOKI
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Koshi-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing method and recording medium capable of suppres...
Patent number
11,079,679
Issue date
Aug 3, 2021
Tokyo Electron Limited
Yusaku Hashimoto
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Development processing apparatus, development processing method, an...
Patent number
10,359,702
Issue date
Jul 23, 2019
Tokyo Electron Limited
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Development method, development device, and non-transitory computer...
Patent number
10,203,605
Issue date
Feb 12, 2019
Tokyo Electron Limited
Yusaku Hashimoto
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing method, substrate processing apparatus, and no...
Patent number
10,185,220
Issue date
Jan 22, 2019
Tokyo Electron Limited
Yusaku Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Developing method, developing apparatus, and storage medium
Patent number
10,108,111
Issue date
Oct 23, 2018
Tokyo Electron Limited
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Developing method, developing apparatus and storage medium
Patent number
9,690,202
Issue date
Jun 27, 2017
Tokyo Electron Limited
Yuichi Terashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Rinse treatment method, developing treatment method and developing...
Patent number
7,977,039
Issue date
Jul 12, 2011
Tokyo Electron Limited
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Rinsing method and developing method
Patent number
7,419,773
Issue date
Sep 2, 2008
Tokyo Electron Limited
Ryouichirou Naitou
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
Publication number
20240248413
Publication date
Jul 25, 2024
TOKYO ELECTRON LIMITED
Takeshi SHIMOAOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM CAPABLE OF SUPPRES...
Publication number
20200050111
Publication date
Feb 13, 2020
TOKYO ELECTRON LIMITED
Yusaku Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVELOPMENT PROCESSING APPARATUS, DEVELOPMENT PROCESSING METHOD, AN...
Publication number
20190146344
Publication date
May 16, 2019
TOKYO ELECTRON LIMITED
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing Method, Developing Apparatus, and Storage Medium
Publication number
20180284652
Publication date
Oct 4, 2018
TOKYO ELECTRON LIMITED
Takeshi SHIMOAOKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20180157178
Publication date
Jun 7, 2018
TOKYO ELECTRON LIMITED
Yusaku Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVELOPMENT METHOD, DEVELOPMENT DEVICE, AND NON-TRANSITORY COMPUTER...
Publication number
20170285481
Publication date
Oct 5, 2017
TOKYO ELECTRON LIMITED
Yusaku HASHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND NO...
Publication number
20170102616
Publication date
Apr 13, 2017
TOKYO ELECTRON LIMITED
Yusaku HASHIMOTO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
Publication number
20160070171
Publication date
Mar 10, 2016
TOKYO ELECTRON LIMITED
Yuichi TERASHITA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Rinsing method and developing method
Publication number
20090042149
Publication date
Feb 12, 2009
Ryouichirou Naitou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate Processing Method
Publication number
20090004607
Publication date
Jan 1, 2009
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Rinsing method and developing method
Publication number
20070134601
Publication date
Jun 14, 2007
Ryouichirou Naitou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Rinse treatment method, developing treatment method and developing...
Publication number
20070072092
Publication date
Mar 29, 2007
TOKYO ELECTRON LIMITED
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY