Takeshi Soma

Follow

Person

Saitama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing pad surface shape measuring instrument, method of using p...
- Patent number 7,486,407
- Issue date Feb 3, 2009
- Nikon Corporation
- Toshihisa Tanaka
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad surface shape measuring instrument, method of using p...
- Patent number 7,359,069
- Issue date Apr 15, 2008
- Nikon Corporation
- Toshihisa Tanaka
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Polishing pad surface shape measuring instrument, method of using p...
- Publication number 20080186511
- Publication date Aug 7, 2008
- NIKON CORPORATION
- Toshihisa Tanaka
- B24 - GRINDING POLISHING
Information Patent Application
Polishing pad surface shape measuring instrument, method of using p...
- Publication number 20060260745
- Publication date Nov 23, 2006
- NIKON CORPORATION
- Toshihisa Tanaka
- B24 - GRINDING POLISHING
Information Patent Application
Wafer polishing control system for chemical mechanical planarizatio...
- Publication number 20050221736
- Publication date Oct 6, 2005
- Nikon Corporation
- Yi-Ping Hsin
- B24 - GRINDING POLISHING