Takeshi Sugamata

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 9,589,823
- Issue date Mar 7, 2017
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MOUNTING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20140346152
- Publication date Nov 27, 2014
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS