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Takeshi Suto
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Funabashi, JP
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last 30 patents
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Patent Grant
Projection exposure apparatus
Patent number
4,931,830
Issue date
Jun 5, 1990
Nikon Corporation
Kyoichi Suwa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Surface displacement sensor with opening angle control
Patent number
4,748,333
Issue date
May 31, 1988
Nippon Kogaku K.K.
Hideo Mizutani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for measuring dimensions of micropattern
Patent number
4,744,662
Issue date
May 17, 1988
Nippon Kogaku K.K.
Takeshi Suto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for measuring the dimensions of a minute object
Patent number
4,732,484
Issue date
Mar 22, 1988
Nippon Kogaku K.K.
Takeshi Suto
G01 - MEASURING TESTING