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Takeshi YAMAMOTO
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Yamanashi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for forming TiN and storage medium
Patent number
9,257,278
Issue date
Feb 9, 2016
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
TiN film forming method and storage medium
Patent number
9,133,548
Issue date
Sep 15, 2015
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD FOR FORMING TiN AND STORAGE MEDIUM
Publication number
20150004803
Publication date
Jan 1, 2015
Hideaki Yamasaki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
TiN FILM FORMING METHOD AND STORAGE MEDIUM
Publication number
20140206189
Publication date
Jul 24, 2014
TOKYO ELECTRON LIMITED
Hideaki YAMASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...