Taketo UENO

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defect inspection device and defect inspection method
- Patent number 10,228,332
- Issue date Mar 12, 2019
- Hitachi High-Technologies Corporation
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for detecting defects and method and device for o...
- Patent number 9,683,946
- Issue date Jun 20, 2017
- Hitachi High-Technologies Corporation
- Yuko Otani
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 9,588,055
- Issue date Mar 7, 2017
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defect
- Patent number 9,535,013
- Issue date Jan 3, 2017
- Hitachi High-Technologies Corporation
- Shunichi Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and device thereof
- Patent number 9,255,793
- Issue date Feb 9, 2016
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Optical filtering device, defect inspection method and apparatus th...
- Patent number 9,182,592
- Issue date Nov 10, 2015
- Hitachi, Ltd.
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection device and defect inspection method
- Patent number 9,019,492
- Issue date Apr 28, 2015
- Hitachi High-Technologies Corporation
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting apparatus and defect inspecting method
- Patent number 8,970,836
- Issue date Mar 3, 2015
- Hitachi High-Technologies Corporation
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and apparatus therefor
- Patent number 8,885,037
- Issue date Nov 11, 2014
- Hitachi High-Technologies Corporation
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting apparatus and defect inspecting method
- Patent number 8,830,465
- Issue date Sep 9, 2014
- Hitachi High-Technologies Corporation
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method of defect inspection and device of defect inspection
- Patent number 8,804,112
- Issue date Aug 12, 2014
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Dark-field defect inspecting method, dark-field defect inspecting a...
- Patent number 8,681,328
- Issue date Mar 25, 2014
- Hitachi High-Technologies Corporation
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection system
- Patent number 8,660,336
- Issue date Feb 25, 2014
- Hitachi High-Technologies Corporation
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 8,289,507
- Issue date Oct 16, 2012
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection system
- Patent number 8,275,189
- Issue date Sep 25, 2012
- Hitachi High-Technologies Corporation
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 7,952,700
- Issue date May 31, 2011
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection system
- Patent number 7,881,520
- Issue date Feb 1, 2011
- Hitachi High-Technologies Corporation
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 7,817,261
- Issue date Oct 19, 2010
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting a semiconductor device
- Patent number 7,643,140
- Issue date Jan 5, 2010
- Hitachi High-Technologies Corporation
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Method of apparatus for detecting particles on a specimen
- Patent number 7,369,223
- Issue date May 6, 2008
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring alignment accuracy, as well as m...
- Patent number 7,271,908
- Issue date Sep 18, 2007
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring alignment accuracy, as well as m...
- Patent number 6,897,956
- Issue date May 24, 2005
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Defect Inspection Device and Defect Inspection Method
- Publication number 20170146463
- Publication date May 25, 2017
- Hitachi High-Technologies Corporation
- Toshifumi HONDA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR DETECTING DEFECTS AND METHOD AND DEVICE FOR O...
- Publication number 20150276622
- Publication date Oct 1, 2015
- Hitachi High-Technologies Corporation
- Yuko Otani
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
- Publication number 20150062581
- Publication date Mar 5, 2015
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspecting Apparatus and Defect Inspecting Method
- Publication number 20140233024
- Publication date Aug 21, 2014
- Hitachi High-Techmologies Corporation
- Atsushi Taniguchi
- G02 - OPTICS
Information Patent Application
Optical Filtering Device, Defect Inspection Method and Apparatus Th...
- Publication number 20140160471
- Publication date Jun 12, 2014
- Taketo Ueno
- G02 - OPTICS
Information Patent Application
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
- Publication number 20130242294
- Publication date Sep 19, 2013
- Hitachi High-Technologies Corporation
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTING APPARATUS AND DEFECT INSPECTING METHOD
- Publication number 20130188184
- Publication date Jul 25, 2013
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING DEFECT
- Publication number 20130114880
- Publication date May 9, 2013
- Shunichi Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION SYSTEM
- Publication number 20130058558
- Publication date Mar 7, 2013
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEVICE THEREOF
- Publication number 20120296576
- Publication date Nov 22, 2012
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF DEFECT INSPECTION AND DEVICE OF DEFECT INSPECTION
- Publication number 20120092657
- Publication date Apr 19, 2012
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND APPARATUS THEREFOR
- Publication number 20120092484
- Publication date Apr 19, 2012
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Application
DARK-FIELD DEFECT INSPECTING METHOD, DARK-FIELD DEFECT INSPECTING A...
- Publication number 20110286001
- Publication date Nov 24, 2011
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
- Publication number 20110228258
- Publication date Sep 22, 2011
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION SYSTEM
- Publication number 20110069895
- Publication date Mar 24, 2011
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
- Publication number 20110032515
- Publication date Feb 10, 2011
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING A SEMICONDUCTOR DEVICE
- Publication number 20080239289
- Publication date Oct 2, 2008
- Taketo UENO
- G01 - MEASURING TESTING
Information Patent Application
Method Of Apparatus For Detecting Particles On A Specimen
- Publication number 20080204724
- Publication date Aug 28, 2008
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTING DEFECTS
- Publication number 20080068593
- Publication date Mar 20, 2008
- HIROYUKI NAKANO
- G01 - MEASURING TESTING
Information Patent Application
Defect inspection system
- Publication number 20070053581
- Publication date Mar 8, 2007
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Application
Method of apparatus for detecting particles on a specimen
- Publication number 20050213086
- Publication date Sep 29, 2005
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for measuring alignment accuracy, as well as m...
- Publication number 20050206898
- Publication date Sep 22, 2005
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for measuring alignment accuracy, as well as m...
- Publication number 20030160960
- Publication date Aug 28, 2003
- Minori Noguchi
- G01 - MEASURING TESTING

Taketo UENO

Person

Patents Grantslast 30 patents

Defect inspection device and defect inspection method

Method and device for detecting defects and method and device for o...

Defect inspection apparatus and defect inspection method

Method and apparatus for inspecting defect

Defect inspection method and device thereof

Optical filtering device, defect inspection method and apparatus th...

Defect inspection device and defect inspection method

Defect inspecting apparatus and defect inspecting method

Defect inspection method and apparatus therefor

Defect inspecting apparatus and defect inspecting method

Method of defect inspection and device of defect inspection

Dark-field defect inspecting method, dark-field defect inspecting a...

Defect inspection system

Method of apparatus for detecting particles on a specimen

Defect inspection system

Method of apparatus for detecting particles on a specimen

Defect inspection system

Method of apparatus for detecting particles on a specimen

Method and apparatus for inspecting a semiconductor device

Method of apparatus for detecting particles on a specimen

Apparatus and method for measuring alignment accuracy, as well as m...

Apparatus and method for measuring alignment accuracy, as well as m...

Patents Applicationslast 30 patents

Defect Inspection Device and Defect Inspection Method

METHOD AND DEVICE FOR DETECTING DEFECTS AND METHOD AND DEVICE FOR O...

DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD

Defect Inspecting Apparatus and Defect Inspecting Method

Optical Filtering Device, Defect Inspection Method and Apparatus Th...

DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

DEFECT INSPECTING APPARATUS AND DEFECT INSPECTING METHOD

METHOD AND APPARATUS FOR INSPECTING DEFECT

DEFECT INSPECTION SYSTEM

DEFECT INSPECTION METHOD AND DEVICE THEREOF

METHOD OF DEFECT INSPECTION AND DEVICE OF DEFECT INSPECTION

DEFECT INSPECTION METHOD AND APPARATUS THEREFOR

DARK-FIELD DEFECT INSPECTING METHOD, DARK-FIELD DEFECT INSPECTING A...

METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN

DEFECT INSPECTION SYSTEM

METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN

METHOD AND APPARATUS FOR INSPECTING A SEMICONDUCTOR DEVICE

Method Of Apparatus For Detecting Particles On A Specimen

METHOD AND APPARATUS FOR DETECTING DEFECTS

Defect inspection system

Method of apparatus for detecting particles on a specimen

Apparatus and method for measuring alignment accuracy, as well as m...

Apparatus and method for measuring alignment accuracy, as well as m...