Taketoshi Okajo

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate temperature adjusting method and a method of changing the...
- Patent number 9,410,753
- Issue date Aug 9, 2016
- Tokyo Electron Limited
- Toshiyuki Makabe
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Chamber cleaning method
- Patent number 8,999,068
- Issue date Apr 7, 2015
- Tokyo Electron Limited
- Masanobu Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for evaluating a substrate mounting device
- Patent number 8,573,836
- Issue date Nov 5, 2013
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 7,646,581
- Issue date Jan 12, 2010
- Sumitomo Osaka Cement Co., Ltd.
- Yasuharu Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, pressure control method for substra...
- Patent number 7,592,569
- Issue date Sep 22, 2009
- Tokyo Electron Limited
- Taketoshi Okajo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for diagnosing electrostatic chuck, vacuum processing appara...
- Patent number 7,582,491
- Issue date Sep 1, 2009
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MET...
- Publication number 20130228323
- Publication date Sep 5, 2013
- TOKYO ELECTRON LIMITED
- Toshiyuki MAKABE
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
CHAMBER CLEANING METHOD
- Publication number 20110048453
- Publication date Mar 3, 2011
- TOKYO ELECTRON LIMITED
- Masanobu Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20100122774
- Publication date May 20, 2010
- TOKYO ELECTRON LIMITED
- Toshiyuki MAKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TESTING A TEMPERATURE MONITORING SUBSTRATE
- Publication number 20080212640
- Publication date Sep 4, 2008
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR EVALUATING A SUBSTRATE MOUNTING DEVICE
- Publication number 20080098833
- Publication date May 1, 2008
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DIAGNOSING ELECTROSTATIC CHUCK, VACUUM PROCESSING APPARA...
- Publication number 20080102209
- Publication date May 1, 2008
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20070217114
- Publication date Sep 20, 2007
- Yasuharu Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus, pressure control method for substra...
- Publication number 20060086259
- Publication date Apr 27, 2006
- TOKYO ELECTRON LIMITED
- Taketoshi Okajo
- H01 - BASIC ELECTRIC ELEMENTS

Taketoshi Okajo

Person

Patents Grantslast 30 patents

Substrate temperature adjusting method and a method of changing the...

Chamber cleaning method

Apparatus and method for evaluating a substrate mounting device

Electrostatic chuck

Substrate processing apparatus, pressure control method for substra...

Method for diagnosing electrostatic chuck, vacuum processing appara...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MET...

CHAMBER CLEANING METHOD

SUBSTRATE MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS HAVING...

APPARATUS AND METHOD FOR TESTING A TEMPERATURE MONITORING SUBSTRATE

APPARATUS AND METHOD FOR EVALUATING A SUBSTRATE MOUNTING DEVICE

METHOD FOR DIAGNOSING ELECTROSTATIC CHUCK, VACUUM PROCESSING APPARA...

ELECTROSTATIC CHUCK

Substrate processing apparatus, pressure control method for substra...