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Taketoshi Sato
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Toyama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
9,831,083
Issue date
Nov 28, 2017
Hitachi Kokusai Electric Inc.
Daigo Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
9,587,314
Issue date
Mar 7, 2017
Hitachi Kokusai Electric Inc.
Taketoshi Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, non-transitory computer-readable re...
Patent number
9,502,236
Issue date
Nov 22, 2016
Hitachi Kokusai Electric Inc.
Yukitomo Hirochi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing a semiconductor device, method of processin...
Patent number
9,337,015
Issue date
May 10, 2016
Hitachi Kokusai Electric Inc.
Tsuyoshi Takeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device manufacturing and processing methods and appar...
Patent number
9,184,046
Issue date
Nov 10, 2015
Hitachi Kokusai Electric Inc.
Tsuyoshi Takeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
9,111,748
Issue date
Aug 18, 2015
Hitachi Kokusai Electric Inc.
Daigo Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device manufacturing and processing methods and appar...
Patent number
9,090,969
Issue date
Jul 28, 2015
Hitachi Kokusai Electric Inc.
Tsuyoshi Takeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, non-transitory computer-readable re...
Patent number
9,064,695
Issue date
Jun 23, 2015
Hitachi Kokusai Electric Inc.
Yukitomo Hirochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method and substrate processing...
Patent number
8,590,484
Issue date
Nov 26, 2013
Hitachi Kokusai Electric Inc.
Taketoshi Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device and substrate processi...
Patent number
8,404,603
Issue date
Mar 26, 2013
Hitachi Kokusai Electric Inc.
Arito Ogawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and reaction container
Patent number
8,261,692
Issue date
Sep 11, 2012
Hitachi Kokusai Electric Inc.
Tadashi Kontani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of producing semiconductor device
Patent number
8,227,346
Issue date
Jul 24, 2012
Hitachi Kokusai Electric Inc.
Hironobu Miya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and semiconductor device manufacturi...
Patent number
8,193,101
Issue date
Jun 5, 2012
Hitachi Kokusai Electric, Inc.
Taketoshi Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing semiconductor device
Patent number
8,105,957
Issue date
Jan 31, 2012
Hitachi Kokusai Electric Inc.
Hironobu Miya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device manufacturing method and substrate processing...
Patent number
8,093,158
Issue date
Jan 10, 2012
Hitachi Kokusai Electric, Inc.
Taketoshi Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and reaction container
Patent number
8,047,158
Issue date
Nov 1, 2011
Hitachi Kokusai Electric Inc.
Tadashi Kontani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Production method for semiconductor device
Patent number
8,039,404
Issue date
Oct 18, 2011
Hitachi Kokusai Electric Inc.
Hironobu Miya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and reaction container
Patent number
7,900,580
Issue date
Mar 8, 2011
Hitachi Kokusai Electric Inc.
Tadashi Kontani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and producing method of semiconducto...
Patent number
7,892,983
Issue date
Feb 22, 2011
Hitachi Kokusai Electric Inc.
Hironobu Miya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Production method for semiconductor device and substrate processing...
Patent number
7,779,785
Issue date
Aug 24, 2010
Hitachi Kokusai Electric Inc.
Hironobu Miya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
Publication number
20220298642
Publication date
Sep 22, 2022
Kokusai Electric Corporation
Taketoshi SATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20160233085
Publication date
Aug 11, 2016
Hitachi Kokusai Electric Inc.
Daigo YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus
Publication number
20150315702
Publication date
Nov 5, 2015
Hitachi Kokusai Electric Inc.
Daigo YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING AND PROCESSING METHODS AND APPAR...
Publication number
20150294854
Publication date
Oct 15, 2015
Hitachi Kokusai Electric Inc.
Tsuyoshi TAKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RE...
Publication number
20150194304
Publication date
Jul 9, 2015
Hitachi Kokusai Electric Inc.
Yukitomo Hirochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus, Non-Transitory Computer-Readable Re...
Publication number
20150194306
Publication date
Jul 9, 2015
Hitachi Kokusai Electric Inc.
Yukitomo Hirochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, METHOD OF MANUFACTURING SEMICONDUCTOR...
Publication number
20150187611
Publication date
Jul 2, 2015
Hitachi Kokusai Electric Inc.
Taketoshi SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COM...
Publication number
20150170909
Publication date
Jun 18, 2015
Hitachi Kokusai Electric Inc.
Taketoshi SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20150155201
Publication date
Jun 4, 2015
Hitachi Kokusai Electric Inc.
Taketoshi SATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
Publication number
20140087565
Publication date
Mar 27, 2014
Hitachi Kokusai Electric Inc.
Daigo Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, METHOD OF PROCESSIN...
Publication number
20130280921
Publication date
Oct 24, 2013
Hitachi Kokusai Electric Inc.
Tsuyoshi TAKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING MET...
Publication number
20120329286
Publication date
Dec 27, 2012
Hitachi Kokusai Electric Inc.
Tsuyoshi TAKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PRODUCING SEMICONDUCTOR DEVICE
Publication number
20120077350
Publication date
Mar 29, 2012
Hironobu Miya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
Publication number
20120073500
Publication date
Mar 29, 2012
Taketoshi Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PRODUCING SEMICONDUCTOR DEVICE
Publication number
20120034790
Publication date
Feb 9, 2012
Hironobu Miya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
Publication number
20110065283
Publication date
Mar 17, 2011
Hitachi Kokusai Electric, Inc.
Taketoshi SATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PRODUCING METHOD OF SEMICONDUCTO...
Publication number
20110045675
Publication date
Feb 24, 2011
Hironobu MIYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
Publication number
20110003482
Publication date
Jan 6, 2011
Hitachi Kokusai Electric Inc.
Arito Ogawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND REACTION CONTAINER
Publication number
20100263593
Publication date
Oct 21, 2010
Tadashi Kontani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING...
Publication number
20100233887
Publication date
Sep 16, 2010
Hitachi Kokusai Electric Inc.
Hironobu Miya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
Publication number
20100015811
Publication date
Jan 21, 2010
Hitachi Kokusai Electric Inc.
Taketoshi Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING...
Publication number
20090280652
Publication date
Nov 12, 2009
Hironobu Miya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20090205568
Publication date
Aug 20, 2009
Norikazu MIZUNO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus and Reaction Container
Publication number
20080251015
Publication date
Oct 16, 2008
Tadashi Kontani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus and Reaction Container
Publication number
20080251014
Publication date
Oct 16, 2008
Tadashi Kontani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus and Producing Method of Semiconducto...
Publication number
20080166882
Publication date
Jul 10, 2008
Hitachi Kokusai Electric Inc.
Hironobu Miya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20080145533
Publication date
Jun 19, 2008
Hitachi Kokusai Electric Inc.
Koichi Honda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Production Method for Semiconductor Device and Substrate Processing...
Publication number
20080124945
Publication date
May 29, 2008
Hitachi Kokusa Electric Inc.
Hironobu Miya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus and Reaction Container
Publication number
20080121180
Publication date
May 29, 2008
Tadashi Kontani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Method and Substrate Processing Apparatus
Publication number
20070292974
Publication date
Dec 20, 2007
Hitachi Kokusai Electric Inc.
Norikazu Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...