Taketoshi TOMIOKA

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate support
- Patent number 11,521,886
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucking method and substrate processing apparatus
- Patent number 10,825,709
- Issue date Nov 3, 2020
- Tokyo Electron Limited
- Yasuharu Sasaki
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 10,714,370
- Issue date Jul 14, 2020
- Tokyo Electron Limited
- Taketoshi Tomioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucking method and substrate processing apparatus
- Patent number 10,269,607
- Issue date Apr 23, 2019
- Tokyo Electron Limited
- Yasuharu Sasaki
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
FOCUS RING AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210316416
- Publication date Oct 14, 2021
- TOKYO ELECTRON LIMITED
- Taketoshi TOMIOKA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE SUPPORT
- Publication number 20210005495
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190221464
- Publication date Jul 18, 2019
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
FOCUS RING AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180182635
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Toshiya Tsukahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FOCUS RING AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170066103
- Publication date Mar 9, 2017
- TOKYO ELECTRON LIMITED
- Taketoshi TOMIOKA
- B24 - GRINDING POLISHING
Information Patent Application
ELECTROSTATIC CHUCKING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160189994
- Publication date Jun 30, 2016
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
MOUNTING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20140238609
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Taketoshi TOMIOKA
- H01 - BASIC ELECTRIC ELEMENTS

Taketoshi TOMIOKA

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate support

Electrostatic chucking method and substrate processing apparatus

Mounting table and plasma processing apparatus

Electrostatic chucking method and substrate processing apparatus

Patents Applicationslast 30 patents

FOCUS RING AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE SUPPORT

ELECTROSTATIC CHUCKING METHOD AND SUBSTRATE PROCESSING APPARATUS

FOCUS RING AND SUBSTRATE PROCESSING APPARATUS

FOCUS RING AND SUBSTRATE PROCESSING APPARATUS

ELECTROSTATIC CHUCKING METHOD AND SUBSTRATE PROCESSING APPARATUS

MOUNTING TABLE AND PLASMA PROCESSING APPARATUS