Takeyuki Mizutani

Person

Saitama-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 9,958,785
- Issue date May 1, 2018
- Nikon Corporation
- Takeyuki Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithographic apparatus rinsing outer contour of substrate...
- Patent number 8,941,808
- Issue date Jan 27, 2015
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 8,780,326
- Issue date Jul 15, 2014
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,675,174
- Issue date Mar 18, 2014
- Nikon Corporation
- Takeyuki Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding apparatus, exposure apparatus, exposing method, a...
- Patent number 8,089,615
- Issue date Jan 3, 2012
- Nikon Corporation
- Takeyuki Mizutani
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing method, exposure apparatus, and method for pro...
- Patent number 8,040,489
- Issue date Oct 18, 2011
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20180239261
- Publication date Aug 23, 2018
- Nikon Corporation
- Takeyuki MIZUTANI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20140111783
- Publication date Apr 24, 2014
- Nikon Corporation
- Takeyuki MIZUTANI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method, exposure apparatus, and method for pro...
- Publication number 20120008112
- Publication date Jan 12, 2012
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and device manufacturing method
- Publication number 20110222037
- Publication date Sep 15, 2011
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Maintenance method, exposure method and apparatus, and device manuf...
- Publication number 20090109413
- Publication date Apr 30, 2009
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate for Exposure, Exposure Method and Device Manufacturing Me...
- Publication number 20080318152
- Publication date Dec 25, 2008
- Takeyuki Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method, exposure apparatus, and method for pro...
- Publication number 20080246931
- Publication date Oct 9, 2008
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate holding apparatus, exposure apparatus, exposing method, a...
- Publication number 20080239275
- Publication date Oct 2, 2008
- Nikon Corporation
- Takeyuki MIZUTANI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid Removing Apparatus, Exposure Apparatus and Device Fabricatin...
- Publication number 20080165330
- Publication date Jul 10, 2008
- Nikon Corporation
- Takeyuki Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate Processing Method, Exposure Apparatus, and Method For Pro...
- Publication number 20080143980
- Publication date Jun 19, 2008
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20080137047
- Publication date Jun 12, 2008
- Nikon Corporation
- Takeyuki Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus, Exposure Method, and Method for Producing Device
- Publication number 20080032234
- Publication date Feb 7, 2008
- Takeyuki Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method, exposure apparatus, and method for pro...
- Publication number 20070242248
- Publication date Oct 18, 2007
- Nikon Corporation
- Katsushi Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Method and Apparatus, and Device Manufacturing Method
- Publication number 20070206167
- Publication date Sep 6, 2007
- Takeyuki Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takeyuki Mizutani

Person

Patents Grantslast 30 patents

Exposure apparatus, exposure method, and method for producing device

Immersion lithographic apparatus rinsing outer contour of substrate...

Exposure apparatus, exposure method, and device manufacturing method

Exposure apparatus, exposure method, and method for producing device

Substrate holding apparatus, exposure apparatus, exposing method, a...

Substrate processing method, exposure apparatus, and method for pro...

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

Substrate processing method, exposure apparatus, and method for pro...

Exposure apparatus, exposure method, and device manufacturing method

Maintenance method, exposure method and apparatus, and device manuf...

Substrate for Exposure, Exposure Method and Device Manufacturing Me...

Substrate processing method, exposure apparatus, and method for pro...

Substrate holding apparatus, exposure apparatus, exposing method, a...

Liquid Removing Apparatus, Exposure Apparatus and Device Fabricatin...

Substrate Processing Method, Exposure Apparatus, and Method For Pro...

Exposure apparatus and device manufacturing method

Exposure Apparatus, Exposure Method, and Method for Producing Device

Substrate processing method, exposure apparatus, and method for pro...

Exposure Method and Apparatus, and Device Manufacturing Method