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Takiji ISHIMURA
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Kanagawa-ken, JP
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last 30 patents
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Patent Grant
Electron beam writing apparatus and output control method
Patent number
9,384,939
Issue date
Jul 5, 2016
NuFlare Technology, Inc.
Kennosuke Itagaki
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ELECTRON BEAM WRITING APPARATUS AND OUTPUT CONTROL METHOD
Publication number
20160141143
Publication date
May 19, 2016
NuFlare Technology, Inc.
Kennosuke ITAGAKI
H01 - BASIC ELECTRIC ELEMENTS