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Taku Hitomi
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Tokyo, JP
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last 30 patents
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Patent Grant
Method of forming ultra-thin SiN film by plasma CVD
Patent number
7,638,443
Issue date
Dec 29, 2009
ASM Japan K.K.
Rei Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD OF FORMING ULTRA-THIN SiN FILM BY PLASMA CVD
Publication number
20080113521
Publication date
May 15, 2008
ASM JAPAN K.K.
Rei Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...