Taku Ninomiya

Person

Hitachinaka-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for measuring patterns
- Patent number 10,692,693
- Issue date Jun 23, 2020
- HITACHI HIGH-TECH CORPORATION
- Wei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspecting and measuring device and program
- Patent number 9,858,659
- Issue date Jan 2, 2018
- Hitachi High-Technologies Corporation
- Tsuyoshi Minakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection device and pattern inspection method
- Patent number 9,188,554
- Issue date Nov 17, 2015
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and defect inspection apparatus
- Patent number 8,953,868
- Issue date Feb 10, 2015
- Hitachi High-Technologies Corporation
- Shinya Murakami
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam applied apparatus, and irradiation method
- Patent number 8,907,278
- Issue date Dec 9, 2014
- Hitachi High-Technologies Corporation
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and sample observation method
- Patent number 8,552,373
- Issue date Oct 8, 2013
- Hitachi High-Technologies Corporation
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,855,363
- Issue date Dec 21, 2010
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,425,704
- Issue date Sep 16, 2008
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting a circuit pattern and inspecting instrument
- Patent number 7,397,031
- Issue date Jul 8, 2008
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus using electron beam
- Patent number 7,271,385
- Issue date Sep 18, 2007
- Hitachi High-Technologies Corporation
- Yasuhiro Gunji
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a circuit pattern and inspecting instrument
- Patent number 7,098,455
- Issue date Aug 29, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Circuit pattern inspection method and its apparatus
- Patent number 7,071,468
- Issue date Jul 4, 2006
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,034,298
- Issue date Apr 25, 2006
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Convergent charged particle beam apparatus and inspection method us...
- Patent number 6,885,012
- Issue date Apr 26, 2005
- Hitachi, Ltd.
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Convergent charged particle beam apparatus and inspection method us...
- Patent number 6,744,057
- Issue date Jun 1, 2004
- Hitachi, Ltd.
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a circuit pattern and inspecting instrument
- Patent number 6,583,413
- Issue date Jun 24, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam scanning type automatic inspecting apparatus
- Patent number 6,580,075
- Issue date Jun 17, 2003
- Hitachi, Ltd.
- Masatsugu Kametani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Convergent charged particle beam apparatus and inspection method us...
- Patent number 6,559,459
- Issue date May 6, 2003
- Hitachi, Ltd.
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam scanning type automatic inspecting apparatus
- Patent number 6,538,248
- Issue date Mar 25, 2003
- Hitachi, Ltd.
- Masatsugu Kametani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspecting system using electron beam and inspecting method using same
- Patent number 6,486,472
- Issue date Nov 26, 2002
- Hitachi, Ltd.
- Yasuhiro Gunji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting or measuring a sample based on...
- Patent number 6,465,781
- Issue date Oct 15, 2002
- Hitachi, Ltd.
- Norimasa Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Convergent charged particle beam apparatus and inspection method us...
- Patent number 6,335,532
- Issue date Jan 1, 2002
- Hitachi, Ltd.
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Projecting type charged particle microscope and projecting type sub...
- Patent number 6,310,341
- Issue date Oct 30, 2001
- Hitachi, Ltd.
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of detecting inclination of a specimen and a projection expo...
- Patent number 5,392,115
- Issue date Feb 21, 1995
- Hitachi, Ltd.
- Yoshitada Oshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR MEASURING PATTERNS
- Publication number 20190148108
- Publication date May 16, 2019
- Hitachi High-Technologies Corporation
- Wei SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Inspecting and Measuring Device and Program
- Publication number 20150228063
- Publication date Aug 13, 2015
- Hitachi High-Technologies Corporation
- Tsuyoshi Minakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION DEVICE AND PATTERN INSPECTION METHOD
- Publication number 20150212019
- Publication date Jul 30, 2015
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS
- Publication number 20130322737
- Publication date Dec 5, 2013
- Hitachi High-Technologies Corporation
- Shinya MURAKAMI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM APPLIED APPARATUS, AND IRRADIATION METHOD
- Publication number 20130299697
- Publication date Nov 14, 2013
- Hitachi High-Technologies Corporation
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CIRCUIT PATTERN INSPECTING DEVICE AND INSPECTING METHOD THEREOF
- Publication number 20130271595
- Publication date Oct 17, 2013
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND SAMPLE OBSERVATION METHOD
- Publication number 20120061565
- Publication date Mar 15, 2012
- Hitachi High-Technologies Corporation
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN INSPECTION DEVICE AND METHOD
- Publication number 20110133066
- Publication date Jun 9, 2011
- Mari Nozoe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN INSPECTION METHOD AND INSPECTION APPARATUS
- Publication number 20090206257
- Publication date Aug 20, 2009
- Hitachi High-Technologies Corporation
- Yasuhiro GUNJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection method and apparatus using an electron beam
- Publication number 20090045338
- Publication date Feb 19, 2009
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of inspecting a circuit pattern and inspecting instrument
- Publication number 20060243908
- Publication date Nov 2, 2006
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus using an electron beam
- Publication number 20060192117
- Publication date Aug 31, 2006
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection method and inspection apparatus using electron beam
- Publication number 20060076490
- Publication date Apr 13, 2006
- Yasuhiro Gunji
- G01 - MEASURING TESTING
Information Patent Application
Circuit pattern inspection method and its apparatus
- Publication number 20050109938
- Publication date May 26, 2005
- Hiroshi Miyai
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus using electron beam
- Publication number 20050040331
- Publication date Feb 24, 2005
- Yasuhiro Gunji
- G01 - MEASURING TESTING
Information Patent Application
Convergent charged particle beam apparatus and inspection method us...
- Publication number 20040211919
- Publication date Oct 28, 2004
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus using an electron beam
- Publication number 20040188609
- Publication date Sep 30, 2004
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of inspecting a circuit pattern and inspecting instrument
- Publication number 20030201391
- Publication date Oct 30, 2003
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Convergent charged particle beam apparatus and inspection method us...
- Publication number 20030197130
- Publication date Oct 23, 2003
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam scanning type automatic inspecting apparatus
- Publication number 20030062479
- Publication date Apr 3, 2003
- Masatsugu Kametani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTING SYSTEM USING ELECTRON BEAM AND INSPECTING METHOD USING SAME
- Publication number 20020117619
- Publication date Aug 29, 2002
- Yasuhiro Gunji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Convergent charged particle beam apparatus and inspection method us...
- Publication number 20020053643
- Publication date May 9, 2002
- Maki Tanaka
- G01 - MEASURING TESTING

Taku Ninomiya

Person

Patents Grantslast 30 patents

System and method for measuring patterns

Pattern inspecting and measuring device and program

Pattern inspection device and pattern inspection method

Defect inspection method and defect inspection apparatus

Charged particle beam applied apparatus, and irradiation method

Charged particle beam device and sample observation method

Inspection method and apparatus using an electron beam

Inspection method and apparatus using an electron beam

Method of inspecting a circuit pattern and inspecting instrument

Inspection method and inspection apparatus using electron beam

Method of inspecting a circuit pattern and inspecting instrument

Circuit pattern inspection method and its apparatus

Inspection method and apparatus using an electron beam

Convergent charged particle beam apparatus and inspection method us...

Convergent charged particle beam apparatus and inspection method us...

Method of inspecting a circuit pattern and inspecting instrument

Charged particle beam scanning type automatic inspecting apparatus

Convergent charged particle beam apparatus and inspection method us...

Charged particle beam scanning type automatic inspecting apparatus

Inspecting system using electron beam and inspecting method using same

Method and apparatus for inspecting or measuring a sample based on...

Convergent charged particle beam apparatus and inspection method us...

Projecting type charged particle microscope and projecting type sub...

Method of detecting inclination of a specimen and a projection expo...

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR MEASURING PATTERNS

Pattern Inspecting and Measuring Device and Program

PATTERN INSPECTION DEVICE AND PATTERN INSPECTION METHOD

DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS

CHARGED PARTICLE BEAM APPLIED APPARATUS, AND IRRADIATION METHOD

CIRCUIT PATTERN INSPECTING DEVICE AND INSPECTING METHOD THEREOF

CHARGED PARTICLE BEAM DEVICE AND SAMPLE OBSERVATION METHOD

PATTERN INSPECTION DEVICE AND METHOD

PATTERN INSPECTION METHOD AND INSPECTION APPARATUS

Inspection method and apparatus using an electron beam

Method of inspecting a circuit pattern and inspecting instrument

Inspection method and apparatus using an electron beam

Inspection method and inspection apparatus using electron beam

Circuit pattern inspection method and its apparatus

Inspection method and inspection apparatus using electron beam

Convergent charged particle beam apparatus and inspection method us...

Inspection method and apparatus using an electron beam

Method of inspecting a circuit pattern and inspecting instrument

Convergent charged particle beam apparatus and inspection method us...

Charged particle beam scanning type automatic inspecting apparatus

INSPECTING SYSTEM USING ELECTRON BEAM AND INSPECTING METHOD USING SAME

Convergent charged particle beam apparatus and inspection method us...