Taku Omori

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Akiruno, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for controlling cyclic plasma-assisted process
- Patent number 8,790,743
- Issue date Jul 29, 2014
- ASM IP Holding B.V.
- Taku Omori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS AND THE METHOD THEREOF
- Publication number 20230203654
- Publication date Jun 29, 2023
- ASM IP HOLDING, B.V.
- Paridhi Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...