Taku YAMAZAKI

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Oyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Target supply apparatus, chamber, and extreme ultraviolet light gen...
- Patent number 8,785,895
- Issue date Jul 22, 2014
- Gigaphoton Inc.
- Hiroshi Umeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
TARGET SUPPLY APPARATUS, CHAMBER, AND EXTREME ULTRAVIOLET LIGHT GEN...
- Publication number 20140008552
- Publication date Jan 9, 2014
- Hiroshi UMEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR