Takuji Maruta

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Tochigi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Lithography apparatus, method of forming pattern, and method of man...
- Patent number 11,243,462
- Issue date Feb 8, 2022
- Canon Kabushiki Kaisha
- Hiroaki Itabashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position detection apparatus and method
- Patent number 7,466,414
- Issue date Dec 16, 2008
- Canon Kabushiki Kaisha
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position detection apparatus and method
- Patent number 6,992,766
- Issue date Jan 31, 2006
- Canon Kabushiki Kaisha
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY APPARATUS, METHOD OF FORMING PATTERN, AND METHOD OF MAN...
- Publication number 20190302606
- Publication date Oct 3, 2019
- Canon Kabushiki Kaisha
- Hiroaki Itabashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detection apparatus and method
- Publication number 20060103845
- Publication date May 18, 2006
- Canon Kabushiki Kaisha
- Hiroshi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detection apparatus and method
- Publication number 20030174330
- Publication date Sep 18, 2003
- Canon Kabushiki Kaisha
- Hiroshi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY