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Takuji OKADA
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Kawasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate heat treatment apparatus
Patent number
9,607,868
Issue date
Mar 28, 2017
Canon Anelva Corporation
Takuji Okada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
7,976,716
Issue date
Jul 12, 2011
Canon Anelva Corporation
Yasumi Sago
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chucking stage and substrate processing apparatus
Patent number
RE42175
Issue date
Mar 1, 2011
Canon Anelva Corporation
Yasumi Sago
118 - Coating apparatus
Information
Patent Grant
Substrate processing apparatus
Patent number
7,513,063
Issue date
Apr 7, 2009
Canon Anelva Corporation
Yasumi Sago
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chucking stage and substrate processing apparatus
Patent number
7,220,319
Issue date
May 22, 2007
Canon Anelva Corporation
Yasumi Sago
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Electrostatic chucking stage and substrate processing apparatus
Patent number
7,175,737
Issue date
Feb 13, 2007
Canon Anelva Corporation
Yasumi Sago
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS
Publication number
20130272686
Publication date
Oct 17, 2013
Takuji OKADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM HEATING AND COOLING APPARATUS
Publication number
20110253037
Publication date
Oct 20, 2011
Canon ANELVA Corporation
Koji Tsunekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20090197418
Publication date
Aug 6, 2009
Canon ANELVA Corporation
Yasumi SAGO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrostatic chucking stage and substrate processing apparatus
Publication number
20030222416
Publication date
Dec 4, 2003
Yasumi Sago
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Electrostatic chucking stage and substrate processing apparatus
Publication number
20030198005
Publication date
Oct 23, 2003
Yasumi Sago
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Substrate processing apparatus
Publication number
20030159307
Publication date
Aug 28, 2003
ANELVA CORPORATION
Yasumi Sago
H01 - BASIC ELECTRIC ELEMENTS