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Takuji Sako
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Yamanashi, JP
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last 30 patents
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Patent Grant
Etching method and recording medium
Patent number
10,153,172
Issue date
Dec 11, 2018
Tokyo Electron Limited
Takuji Sako
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20240203694
Publication date
Jun 20, 2024
TOKYO ELECTRON LIMITED
Takuji SAKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND RECORDING MEDIUM
Publication number
20180286695
Publication date
Oct 4, 2018
TOKYO ELECTRON LIMITED
Takuji SAKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND ST...
Publication number
20080184543
Publication date
Aug 7, 2008
TOKYO ELECTRON LIMITED
Takuji Sako
H01 - BASIC ELECTRIC ELEMENTS