Takuji Tada

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Use of design information and defect image information in defect cl...
- Patent number 8,175,373
- Issue date May 8, 2012
- KLA-Tencor Corporation
- Gordon Abbott
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for aberration-insensitive electron beam imaging
- Patent number 7,405,402
- Issue date Jul 29, 2008
- KLA-Tencor Technologies Corporation
- Srinivas Vedula
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHODS FOR REAL-TIME THREE-DIMENSIONAL SEM IMAGING A...
- Publication number 20120223227
- Publication date Sep 6, 2012
- Chien-Huei CHEN
- G01 - MEASURING TESTING
Information Patent Application
USE OF DESIGN INFORMATION AND DEFECT IMAGE INFORMATION IN DEFECT CL...
- Publication number 20100208979
- Publication date Aug 19, 2010
- KLA-Tencor Corporation
- Gordon Abbott
- G06 - COMPUTING CALCULATING COUNTING