Takuma Hayashi

Follow

Person

TOKYO, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate analysis method and substrate analyzer
- Patent number 11,422,071
- Issue date Aug 23, 2022
- IAS, INC
- Katsuhiko Kawabata
- G01 - MEASURING TESTING
Information Patent Grant
Substrate etching apparatus and substrate analysis method
- Patent number 9,741,627
- Issue date Aug 22, 2017
- IAS, INC
- Katsuhiko Kawabata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE ANALYZING METHOD AND SUBSTRATE ANALYZING DEVICE
- Publication number 20220042882
- Publication date Feb 10, 2022
- IAS, INC.
- KATSUHIKO KAWABATA
- G01 - MEASURING TESTING
Information Patent Application
SILICON SUBSTRATE ANALYZING DEVICE
- Publication number 20180217036
- Publication date Aug 2, 2018
- IAS Inc.
- Katsuhiko Kawabata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ETCHING APPARATUS AND SUBSTRATE ANALYSIS METHOD
- Publication number 20150357249
- Publication date Dec 10, 2015
- IAS Inc.
- Katsuhiko Kawabata
- H01 - BASIC ELECTRIC ELEMENTS