Takuma WADA

Person

FUKUOKA-KEN, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 12,051,568
- Issue date Jul 30, 2024
- Toto Ltd.
- Yasutaka Nitta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making a semiconductor manufacturing apparatus member
- Patent number 11,939,678
- Issue date Mar 26, 2024
- Toto Ltd.
- Yasutaka Nitta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus member, and display manufactu...
- Patent number 11,142,829
- Issue date Oct 12, 2021
- Toto Ltd.
- Yasutaka Nitta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite structure
- Patent number 11,117,356
- Issue date Sep 14, 2021
- Toto Ltd.
- Takuma Wada
- B32 - LAYERED PRODUCTS
Information Patent Grant
Composite structure, semiconductor manufacturing apparatus and disp...
- Patent number 10,759,710
- Issue date Sep 1, 2020
- Toto Ltd.
- Junichi Iwasawa
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Electrostatic chuck and wafer processing apparatus
- Patent number 10,714,373
- Issue date Jul 14, 2020
- Toto Ltd.
- Kazuki Anada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 9,300,229
- Issue date Mar 29, 2016
- Toto Ltd.
- Kazuki Anada
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck
- Patent number 9,252,041
- Issue date Feb 2, 2016
- Toto Ltd.
- Kazuki Anada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 9,252,040
- Issue date Feb 2, 2016
- Toto Ltd.
- Kazuki Anada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 9,042,078
- Issue date May 26, 2015
- Toto Ltd.
- Takuma Wada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240331982
- Publication date Oct 3, 2024
- TOTO LTD.
- Yasutaka NITTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING A SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER
- Publication number 20220139676
- Publication date May 5, 2022
- TOTO LTD.
- Yasutaka NITTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER, AND DISPLAY MANUFACTU...
- Publication number 20200270753
- Publication date Aug 27, 2020
- TOTO LTD.
- Yasutaka NITTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER, AND DISPLAY MANUFACTU...
- Publication number 20200273674
- Publication date Aug 27, 2020
- TOTO LTD.
- Yasutaka NITTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER, AND DISPLAY MANUFACTU...
- Publication number 20200273675
- Publication date Aug 27, 2020
- TOTO LTD.
- Yasutaka NITTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING APPARATUS AND DISP...
- Publication number 20190276368
- Publication date Sep 12, 2019
- TOTO LTD.
- Junichi IWASAWA
- C01 - INORGANIC CHEMISTRY
Information Patent Application
COMPOSITE STRUCTURE
- Publication number 20190240961
- Publication date Aug 8, 2019
- TOTO LTD.
- Takuma Wada
- B32 - LAYERED PRODUCTS
Information Patent Application
ELECTROSTATIC CHUCK AND WAFER PROCESSING APPARATUS
- Publication number 20180040499
- Publication date Feb 8, 2018
- TOTO LTD.
- Kazuki ANADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20140355170
- Publication date Dec 4, 2014
- Takuma Wada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20140071582
- Publication date Mar 13, 2014
- TOTO LTD.
- Kazuki ANADA
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20140063681
- Publication date Mar 6, 2014
- TOTO LTD.
- Kazuki ANADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20140063682
- Publication date Mar 6, 2014
- TOTO LTD.
- Kazuki ANADA
- H01 - BASIC ELECTRIC ELEMENTS

Takuma WADA

Person

Patents Grantslast 30 patents

Semiconductor manufacturing apparatus

Method of making a semiconductor manufacturing apparatus member

Semiconductor manufacturing apparatus member, and display manufactu...

Composite structure

Composite structure, semiconductor manufacturing apparatus and disp...

Electrostatic chuck and wafer processing apparatus

Electrostatic chuck

Electrostatic chuck

Electrostatic chuck

Electrostatic chuck

Patents Applicationslast 30 patents

SEMICONDUCTOR MANUFACTURING APPARATUS

METHOD OF MAKING A SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER

SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER, AND DISPLAY MANUFACTU...

SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER, AND DISPLAY MANUFACTU...

SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER, AND DISPLAY MANUFACTU...

COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING APPARATUS AND DISP...

COMPOSITE STRUCTURE

ELECTROSTATIC CHUCK AND WAFER PROCESSING APPARATUS

ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK