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Pattern inspecting device
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Patent number 12,176,181
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Issue date Dec 24, 2024
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HITACHI HIGH-TECH CORPORATION
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Wei Sun
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G06 - COMPUTING CALCULATING COUNTING
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Charged particle beam device
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Patent number 12,142,457
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Issue date Nov 12, 2024
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HITACHI HIGH-TECH CORPORATION
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Takahiro Nishihata
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 11,728,127
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Issue date Aug 15, 2023
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HITACHI HIGH-TECH CORPORATION
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Takuma Yamamoto
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 11,626,266
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Issue date Apr 11, 2023
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HITACHI HIGH-TECH CORPORATION
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Keiichiro Hitomi
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H01 - BASIC ELECTRIC ELEMENTS
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Scanning electron microscope
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Patent number 11,562,882
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Issue date Jan 24, 2023
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HITACHI HIGH-TECH CORPORATION
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Takuma Yamamoto
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H01 - BASIC ELECTRIC ELEMENTS
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Electronic microscope device
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Patent number 11,355,304
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Issue date Jun 7, 2022
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HITACHI HIGH-TECH CORPORATION
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Takahiro Nishihata
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 11,195,690
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Issue date Dec 7, 2021
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HITACHI HIGH-TECH CORPORATION
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Takuma Yamamoto
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H01 - BASIC ELECTRIC ELEMENTS
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Scanning electron microscope
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Patent number 11,133,148
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Issue date Sep 28, 2021
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HITACHI HIGH-TECH CORPORATION
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Takuma Yamamoto
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H01 - BASIC ELECTRIC ELEMENTS
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