Takumi Fujita

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Rotary silicon wafer cleaning apparatus
- Patent number 7,103,990
- Issue date Sep 12, 2006
- Fujikin Incorporated
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Rotary silicon wafer cleaning apparatus
- Publication number 20050126030
- Publication date Jun 16, 2005
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS