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Koshi City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,033,872
Issue date
Jul 9, 2024
Tokyo Electron Limited
Keita Hirase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,972,958
Issue date
Apr 30, 2024
Tokyo Electron Limited
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,948,804
Issue date
Apr 2, 2024
Tokyo Electron Limited
Takumi Honda
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,915,947
Issue date
Feb 27, 2024
Tokyo Electron Limited
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, substrate processing apparatus and rec...
Patent number
11,626,294
Issue date
Apr 11, 2023
Tokyo Electron Limited
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing meihod
Patent number
11,232,959
Issue date
Jan 25, 2022
Tokyo Electron Limited
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
Patent number
10,840,081
Issue date
Nov 17, 2020
Tokyo Electron Limited
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240071794
Publication date
Feb 29, 2024
TOKYO ELECTRON LIMITED
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240068109
Publication date
Feb 29, 2024
TOKYO ELECTRON LIMITED
Takumi Honda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220285166
Publication date
Sep 8, 2022
TOKYO ELECTRON LIMITED
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220108898
Publication date
Apr 7, 2022
TOKYO ELECTRON LIMITED
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210366740
Publication date
Nov 25, 2021
TOKYO ELECTRON LIMITED
Keita HIRASE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210358773
Publication date
Nov 18, 2021
TOKYO ELECTRON LIMITED
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND REC...
Publication number
20200279752
Publication date
Sep 3, 2020
TOKYO ELECTRON LIMITED
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
Publication number
20190371595
Publication date
Dec 5, 2019
TOKYO ELECTRON LIMITED
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20190172734
Publication date
Jun 6, 2019
TOKYO ELECTRON LIMITED
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS