TREA

Takumi Komatsu

Follow

Person

  • Nirasaki-shi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 7,104,217
    • Issue date Sep 12, 2006
    • Tokyo Electron Limited
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 6,915,760
    • Issue date Jul 12, 2005
    • Tokyo Electron Limited
    • Shinji Himori

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20030086840
    • Publication date May 8, 2003
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS