Takuo YAMAMOTO

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Sapporo City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Correction value computation device, correction value computation m...
- Patent number 9,791,854
- Issue date Oct 17, 2017
- Tokyo Electron Limited
- Takuo Yamamoto
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
CORRECTION VALUE COMPUTATION DEVICE, CORRECTION VALUE COMPUTATION M...
- Publication number 20150227139
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Takuo YAMAMOTO
- G05 - CONTROLLING REGULATING